판매용 중고 LAM RESEARCH Sabre 3D #9269753

Plating system, 12" Process: RDL Operating system: Windows XP Footprint: Front end and back end robot Wafer aligner CDM for APT module CDM for XMM module PPT Module (2/4) Plate A duet (1/2) Bath module 1 Plate A flow distribution (1/2) PMA Bath configuration: AANN CE System settings: Pod loader with buttons and lights-PS Notch wafer, 12" Standard polarity Signal tower EIOC Support Advanced FA GEM and data server HSMS Host connection SEMI E84 Automated material handling system Wafer history Proteus configuration Facilities chemical interface Single arm front end robot Dual arm back end robot Real time clock timestamp source Wafer aligner CWS Wafer size detection Single clamshell lift controller CE Module front end settings: IOC Type: Ethernet based IOC (25) Wafers per cassette SEMI E84 Automated cassette transfer Active wafer centering CA Event mode (3) Load ports Traverser (slide axis) vacuum robot Ethernet pod loader communication Extended fix loader command mode With pod present sensor Standard fix loader hardware With pod present sensor Default AMHS setting Serial Port RFID communication PPT2 AWC Enabled checking firmware Robot pod loader map source Pod loader, 13" CE Module CDM for APT module: ADM Process delivery: DI Process CE Module CDM for XMM module: PCDM Module type: SRD Configuration module CE Module PPT module 2: Notch wafer, 13" Post treatment PPT module PPT Tank type: ADM Process DI Super cell configuration: SRD Valve position sensors DI Flow meter CE Module PPT module 4: Notch wafer, 13" Post treatment PPT module type Super cell configuration: SRD Active Wafer Detection (AWD) Valve position sensors DI flow meters N2 Dry CE Module plate A duet 1 and 2: Notch wafer, 13" Cup and contact rinse Separate Anode Chamber (SAC): Cascade Serial plating power supply control Single power supply Cell flow meters: 5 to 50 Liters 88 I/O EIOC Valve position sensors SAC Flow meter Standard SAC pump CE Module bath module 1: Chemical Monitoring System (CMS) Enhanced CMS command set Copper chemical package Multi species dosing algorithm (5) Species Separate Anode Chamber (SAC): Cascade Chemistry tray container bottles (3) Organic dosing containers NESLAB Heater chiller VMS Facility request channel 1 Pump organic dose delivery Dose pump flow switch 88 I/O EIOC Central recirculation pump Renner recirculation pump Bath module 1 CE Module plate-A flow distribution 1 and 2: FDM Flow meter: 0 to 80 LPM Independent FDM pump Central recirculation pump No PMB Bath 2017 vintage.