판매용 중고 AIRCO TEMESCAL BJD-1800 #9212518

Sputter system (3) Cathodes: (2) Cathodes: Configured for RF MAGNETRON co-sputtering Cathode: Configured for DC MAGNETRON sputtering Load lock consists: Gate valve Adapter flange Motorized linear motion assembly Diameter stainless steel process chamber, 18” Lower source tray swings out for maintenance Rotating substrate table: Diameter: 7.5” RF Biasing capability: 300-Watt Rotate: 5 RPM-100 RPM Process chamber: Fully shielded and shielding is flame sprayed Pumped with ALCATEL 5900 Turbo molecular pump (880 l/s) Servo motor controlled throttle valve (3) ANGSTROM SCIENCES MAGNETRON Cathodes: 2” Diameter Independent shutter system ADVANCED ENERGY MDX DC Sputtering power supply: 1kW (2) ADVANCED ENERGY 600 Watt RF Generators Automatic impedance matching networks for magnetron cathode sputtering ADVANCED ENERGY 300 Watt RF Generator Automatic impedance matching networks for biasing substrate (3) MFC (Mass flow controls) Process gas plumbing: UHP Stainless steel VCR Fittings throughout Electro-polished Orbitally welded Fully leak tested Full-scale capacitance manometer: 1 Torr Automatic isolation valve to prevent venting of manometer LEYBOLD D-30 20.9 CFM Mechanical pump System base pressure: Better than 1x10-7 torr Materials: Ti, Cr, W, Ge, Si, Fe, MoS2, ITO, Ag, Nb, Cu, SiN, TiN, Al Documentation 2009 vintage.