판매용 중고 SVG Spare parts for 90 #9400906

Qty / Part number / Description (4) / 99-43936-01 / Indexer assemblies (IES) (1) / 99-45958-01 / Coater module controller, hi spin motor (2) / 99-45959-01 / Developer module controllers, low spin motor (1) / 99-44636-01 / Assembly ,Power supply module 32A SST (1) / 99-42710-01 / Indexer shutter assembly (1) / 85-22664-02 / Keyboard assy main screen monitor (1) / 99-38145-01 / Main shutter assembly (5) / 99-42392-01 / PVB Enclosed temperature controllers, poly-bake (1) / 99-38534-01 / HMPS Module assy, enclosure temperature control (1) / 99-66564-01 / Exhaust flow controller (water) (2) / 99-45452-01 / Developer exhaust flow controllers (2) / 112-59411-01 / Developer spindle motor, spin station low ACC (1) / 112-59410-01 / Coater spindle motor, hi ACC (3) / 99-39982-01 / Coater centering plate assembly (1) / 99-39628-01 / Coater top EBR assembly (1) / 112-144 / Coater motor, spindle,90s air assist (2) / 112-100 / Developer motor, 19:5:1:24 VDC (2) / 112-087 / Main shutter assy, drive motor random shutter (4) / - / GPI Unit OMRON E5 AX Digital controller (1) / - / Sysmac C28H PLC OMRON chemical cabinet (1) / - / Sysmac C200H OMRON PLC chemical cabinet (4) / - / GPI Unit OMRON E5 AX Digital controller (4) / - / Wafergard chemical dispense system WCDS pump (1) / 99-46520-01 / SVG 90 CPU Controller at, supervisor drive (6) / 99-42283-01 / Assembly, heater housing poly-bake (2) / 99-38369-01 / Chill plate assembly (4) / 99-38150-01 / Serial arm assy, arm 5" random (1) / - / MYKROLIS Photo 250 Pump (1) / 99-20076-01 / Coater module assy, catch cup (2) / 99-80207-02 / Coater PCB Assy, spin STA expansion (1) / 99-80166-01 / Vapor prime module PCB, station controller (2) / 99-80166-01 / Developer module PCB, station controller (2) / 99-80166-01 / Cool plate PCB, station controller (4) / 99-80166-01 / Poly-bake module PCB, station controller (2) / 99-80166-01 / PCB Assy, station controller (4) / 99-80166-01 / Indexer module PCB, station controller (1) / 99-80266-01 / Assy PCB, station controller coater module (1) / 99-80270-01 / PCB Sensor multiplexer (1) / 114-059 / Developer module PCB, solenoid valve control (1) / - / Fluid temperature controller FTC.