판매용 중고 NOVELLUS 04-398121-00 #9360574
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ID: 9360574
Spare parts:
Qty / Part number / Description
(1) / 60-162937-00 / PFIEFFER 261 Turbo pump
(1) / 27-268058-00 / Module, pump control / Power interface, TU
(1) / 17-271849-00 / BRKT, Mounting, turbo power supply
(8) / 21-046252-08 / Screws, SKT, hex, M4x8, SS
(4) / 21-041269-12 / Screws, SKT, hex, 10-32x.75, SS
(4) / 21-042023-08 / Washers, flat, 10, SS
(4) / 21-054446-00 / Washers, flat, M4, SS
(4) / 21-042024-07 / Washers, lock, 10, SS
(4) / 21-054447-00 / Washers, lock, M4, SS
(1) / 03-041334-00 / Cable assy, power, LPB, DLCM-S
(1) / 03-267811-00 / Cable assy, turbo pump interface, DLCM-S HI
(1) / 03-283661-00 / Cable Assy, power, TM turbo, C2 DLCM-S
(2) / 22-045561-00 / FTG, 37° FEM, Swivels
(2) / 20-10037-00 / Clamps, hose, 5/8D, SST, 1-ear pinch.
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