판매용 중고 MATTSON Lot of spare parts #9364257
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ID: 9364257
Qty / Part number / Description
(1) / 58700003 / Quartz tube, 6", ATMOS wafer up to 6"
(2) / 57600008 / Gas distribution plates, 6", ATM, tube rect
(1) / 57600009 / Gas distribution plate, 6", ATM, tube trapezoidal
(1) / 58900020 / Wafer tray, 6", ATM, tube
(10) / 58500003 / Quartz pins, wafer tray L-11 mm
(6) / 58500002 / Quartz pins, cool station (O-style)
(10) / 11100031 / Halogen lamps, 6"-8", LT1
(1) / 47800002 / Edge-guard ring, Si Wafer, 6"
(4) / 47900056 / Robot end effectors
(2) / 0-0000000 / O-Ring sets, 6", heater atmosphere, tube
(1) / 17000008 / Pneumatic Valve Unit (PVU)
(1) / 17000046 / Power supply, KNIEL C24-0, 6, 6 24 VDC / 600 mA
(1) / 17000047 / Power supply, KNIEL CPM101 /-15: 5 VDC
(2) / - / Ceramic adhesives, Pt-C
(5) / 58100003 / Thermocouples, Pt-pt 10% Rh.
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