판매용 중고 MATTSON Lot of spare parts #9364257

Qty / Part number / Description (1) / 58700003 / Quartz tube, 6", ATMOS wafer up to 6" (2) / 57600008 / Gas distribution plates, 6", ATM, tube rect (1) / 57600009 / Gas distribution plate, 6", ATM, tube trapezoidal (1) / 58900020 / Wafer tray, 6", ATM, tube (10) / 58500003 / Quartz pins, wafer tray L-11 mm (6) / 58500002 / Quartz pins, cool station (O-style) (10) / 11100031 / Halogen lamps, 6"-8", LT1 (1) / 47800002 / Edge-guard ring, Si Wafer, 6" (4) / 47900056 / Robot end effectors (2) / 0-0000000 / O-Ring sets, 6", heater atmosphere, tube (1) / 17000008 / Pneumatic Valve Unit (PVU) (1) / 17000046 / Power supply, KNIEL C24-0, 6, 6 24 VDC / 600 mA (1) / 17000047 / Power supply, KNIEL CPM101 /-15: 5 VDC (2) / - / Ceramic adhesives, Pt-C (5) / 58100003 / Thermocouples, Pt-pt 10% Rh.