판매용 중고 LAM RESEARCH Process modules for Alliance 9100 PTX #9382951

Upper chamber: A6061 Aluminum alloy Alumite treatment GDP: SiC TCP Coil: Copper silver plated ALN TCP Window Al203 Chamber liner Castable heater (Aluminum alloy and Sheath heater): 1500 W, 120 VAC L-Type matcher Lower chamber: A6061 Aluminum alloy Bipolar ESC Ceramic Electrostatic chuck (4) Ni+Ti Pins wafer lift Al203 Focus ring (One-piece structure) SiN Edge ring (One-piece structure) EPD: NNEP Vacuum system: OSAKA TG2003MBW TMP Pendulum valve vacuum control Capacitance manometer: PM1: 2.67 Pa : MKS 627A PM2: 66.7 Pa : MKS 267A PM3: 1.33 kPa : MKS 625A Fore line: 1.33 kPa : MKS 625A Turbo exhaust: 1.33 kPa : MKS 625A Backside cooling helium: 6.67 kPa : MKS 722A RF System: RF30H TCP Coil: 13.56 MHz, 0 - 3000 W RF25MWC Bias: 4 MHz 0 - 2500 W Matching network: Upper match: TCP Coil Lower match: Bias Missing parts: PCBs (2) PM7 Pendulum valve controllers Assembly 853-441118-002 OPT Endpoint detector.