판매용 중고 FSI / TEL / TOKYO ELECTRON Spare parts for Polaris 2500 #9355801

Qty / Part number / Description (1) / 233017-002 / ZSE2-TI-55 Sensor VAC Polaris (1) / 294123-401 / AMP Stepping motor (2) / 294124-401 / DS043-001741-1 Heater interface bake / Chiller (2) / 294136-401 / BWS2412 PCB EEP Lower module Polaris kirkes (1) / 294182-401 / CCA Motor amp (2) / 294235-401 / Optical sensor theta pub (2) / 429869-001 / PCB Motor amp theta axis (3) / 906470-003 / Screw lead HMDS / Bake / Chill plate (1) / 916368-001 / Vx2132m Valve SMC pneumatics (1) / 919804-001 / Sensor DWR closed hughes.