판매용 중고 EATON NOVA / AXCELIS Spare parts for 6200A #9248433
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ID: 9248433
Qty / Part number / Description
(6) / 0342-0311-1001 / Accel decal feeds through
(5) / 0342-0384-1001 / Suppression feeds through
(2) / 1166-0022-0002 / Data link assys
(5) / 1530-0014-3001 / Electrodes
(4) / 0342-0934-3001 / Shield assys
(2) / 0298-0125-0001 / Unload arms
(2) / 0298-0124-0001 / Load arms
(2) / 401147A101 / Resistor stacks
(1) / 94070044 / Source mag PSU
(1) / 5980-0059-0001 / Accel decal PSU
(1) / 0980-0081-0001 / Vaporizer PSU
(1) / 0980-0081-0001 / Vaporizer PSU
(1) / 0342-1432-0001 / Filament PSU
(1) / 0343-1470-0001 / Glassman high volt PSU
(1) / 885-7307 / Uninterruptible PSU
(1) / 0906-0146-0001 / Fiber optic interface
(1) / 342-0982-4001 / Vaporizer PSU
(1) / 0342-1431-0001 Rev A / Arc discharge PSU
(1) / M120870-01 / Glassman high voltage PSU
(1) / 0342-1432-0001 / Filament PSU
(1) / IMP-900 / Alignment jig
(1) / M277550-01 rev C / Energy monitor
(1) / M784953 / Glassman high volt PSU
(1) / 5880-0108-3001 / Mounting plate
(1) / 0298-162-0001 Rev A / Pivot arm
(1) / 0342-0838-4001 / Beam guide
(1) / 0342-382-0001 Rev A / Dual gas modules
(1) / HE12-10-2-A / PSU
(1) / - / Arc chamber
(1) / - / Circuit breaker
(6) / - / Arc chamber slits
(3) / - / Arc chamber supports
(2) / - / Suppressor screws
(2) / - / Source ext bushings
(2) / - / Source cans.
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