판매용 중고 EATON NOVA / AXCELIS Lot of spare parts for NV 6200AV #9240842

Qty / Part number / Description (2) / 3200023 500AB 3 1 / Humphreys (1) / 0020-35764 EEP-P1-355 / Slit valve (3) / 0042-0001 / Bearing thrusts (4) / 006-062-001 / Bearing rotarys (2) / 0100-00435 / Coupler shaft / SPNDL MOT (1) / 0100-90229 / (8) in Blade controls (7) / 0110-0003-0016 / Nut spacers (3) / 0110-0003-0019 / Spacers 110-004-158 (14) / 0110-0003-0062 / Nut insulatings (13) / 0110-0003-0063 / Nut insulating tops (15) / 0110-0004-0160 / Ball bushing spacers (8) / 0110-0004-0161 / Tilt cam follower shafts (1) / 0110-0005-0019 / Spacer - / 0110-0012-0038 / Shaft ring (5) / 012-038 / Coupling shafts (1) / 012256 / Ion gauge cable (1) / 01281617-01 / PHD Ap 1 1 / 8 x 2-D-P (3) / 0141-0002-0001 / Rotary actuators R11A 3180-B-M-O - / 0141-0007-0001 / Rotary actuator R11A1180-P-D-Q-Z1 (2) / 0141-0018-0001 / Load switch actuators (3) / 0141-0021-0001 / BEAM Shutters assy (3) / 0154 / Seals (3) / 021-NR QJ / BIMBAs (5) / 0243-1454-0002 0342-0709-0001 / HV Probes (1) / 0248A-14128 / S Valve (1) / 0261-0010-0001 / Amplifier servo brush Type DC 5A5 (26) / 0295-0006-2001 / Pac man apertures (4) / 0295-0014-2001 / Quadrapole apertures (12) / 0295-0016-1001 / Beam shutter apertures (21) / 0295-0017-2001 / Defining aperture plates (1) / 0295-0043-0001 / Aperture upstream (5) / 0295-0044-0001 / Aperture aluminium - / 0298-0071-0002 / EX Chamber unload arm, 6" - / 0298-0124-0001 / Inter chamber load arm, 6" (3) / 0298-0125-0001 / Inner chambers upload arm, 6" (1) / 0298-0129-0001 / Chamber upload arm, 5" (2) / 0298-0167-0001 / Pick arm, 5" (4) / 0301-0068 / Switch interfaces (1) / 03030 / Translator board (2) / 0303-0124 / PCBs (1) / 03-16698-00 / CV-Colbilt (9) / 0342-0049-4001 / Chambers vac (13) / 0342-0050-4001 / Condition mod assys (1) 0342-0136-4001 / Beam current integrator (11) / 0342-0138-4001 / A 17 Beam current display drivers (9) / 0342-0139-4001 / Process controls A-15 (4) / 0342-0148-4001 / Control panels with PCB (6) / 0342-0156-4001 / I / O Status displays A4 (10) / 0342-0160-4001 / Relay driver interfaces A-2 (12) / 0342-0161-4001 / A-13 (1) / 0342-0170 / Present value display (3) / 0342-0164-4001 / HVPS Controls A-10 (9) / 0342-0175-4001 / Systems alarm A-12 (2) / 0342-0185 / A3 (3) / 0342-0217 / Beam monitors (5) / 0342-0218 / Beam monitor amps (1) / 0342-0219 / B-4 Sensor amplifier (1) / 0342-0219-4001 / Sensor amp (4) / 0342-0221-4001 / B12 Carrier motor drives (1) / 0342-0228-4001 / B5 (1) / 0342-0232 / A-22 Board (10) / 0342-0254-3001 / Magnet power supplys (7) / 0342-0256-4001 / Source terminal datalinks (2) / 0342-0257-4001 / Magnet term datalinks (5) / 0342-0259-3001 / Source insulators (16) / 0342-0261-4001 / Extraction housing assy with source insulators (4) / 0342-0274-200 / Surge resistors assy (18) / 0342-0290-4001 / Arc discharges P.S (13) / 0342-0291-4001 / Filaments P.S (36) / 0342-0311-1001 / Accel / Deccel feedthrus (17) / 0342-0369-3001 / Copper filament busses (3) / 0342-0369-3002 / Filament rods (32) / 0342-0375-3001 / Supressor screen completes (35) / 0342-0384-1001 / Suppressor feedthrus (6) / 0342-0406-4001 / Magnets P.S (6) / 0342-0408-0001 / BEAM Current intergrators (2) (5) / 0342-0413-4001 / A 16 PCBs (5) / 0342-0433-4001 / Valve drivers (2) / 0342-0436-3001 / Indexer port loads (4) / 0342-0437-4001 / Wafer cooling controllers (5) / 0342-0441-4001 / I / O E4 (5) / 0342-0442-4001 / Driver display (5) / 0342-0445-4001 / Termocouple amplifiers E9 (6) / 0342-0448-4001 / CPU E-3 (5) / 0342-0450-4001 / E-2 (1) / 0342-0452-3001 / Endstation keybaords (5) / 0342-0452-4001 / Microprocessors E7 (8) / 0342-0458-4001 / E6 (10) / 0342-0459-4001 / E8 Interfaces (7) / 0342-0466-3001 / Wafer sensor assys - / 0342-0475-2001 / Scanner feedthru N (5) / 0342-0519-2001 / Vaporizer source crucibles (1) / 0342-0522-0001 / PCB (80) / 0342-0549-2001 / Resistors STL12 (4) / 0342-0565-3001 / Cooling plates (3) / 0342-0568-2001 / Oven TC vaporizer SCE plates (10) / 0342-0576-4001 / HV P.S. Controls A-10 (1) / 0342-0581-2001 / Plate saay oven gas (5) / 0342-0589-2001 / Vaporizer heatera (9) / 0342-0601-4001 / Filament controllers (6) / 0342-0607-0001 / A-19 (11) / 0342-0646-2001 / Lens feedthrus (5) / 0342-0647-4001 / Electrostatic quadrapoles (4) / 0342-0648-3001 / Accel colloumbs (22) / 0342-0652-4001 / Terminal HV Datalinks (2) / 0342-0667-3001 / Rotary shutter Assys (27) / 0342-0668-4001 / Printer interfaces (5) / 0342-0678 / Scan amps (6) / 0342-0679-4001 / System monitor interfaces A-20 (3) / 0342-0681-4001 / PCB (8) / 0342-0684-4001 / I / O Status interfaces A-1 (3) / 0342-0685 / Autoflood controls (3) / 0342-0689-4001 / PCB in computers (5) / 0342-0707 / Interface computers (2) / 0342-0716-4001 / Discharge power supplys PCB (1) / 0342-0717-4001 / AMU Assys (5) / 0342-0722-4001 / 1% Resistor complete with (Meg 100) (1) / 0342-0748-0001 / CAP PCB (3) / 0342-0810 / Beam scanning con units (300) (1) / 0342-0837-3001 / Focus P.S Cable (4) / 0342-0854-4001 / Auto reg controller units (500) (1) / 0342-0887-4001 / Insulator column (1) / 0342-0887-4001 KIT / Pumping tube kit (2) / 0342-0900-4001 / Indexer drivers (2) / 0342-0906-4001 / Datalinks (5) / 0342-0908-0001 / Data links (3) / 0342-0910-4001 / Servo amps (1) / 0342-0913-0001 / Keyboard (1) / 0342-0917-0001 / Term and Accelerator control (1) / 0342-0918-0001 / Terminal control (2) / 0342-0922-4001 / Drivers (7) / 0342-0934-3001 / Corona shields (1) / 0342-0967-4001 / Power monitor (1) / 0342-0977-4001 / Input / Output H-3 (1) / 0342-0982-4001 / Vaporizer power supply - / 0342-0978-0007 / Scan amp (4) / 0342-0983-2001 / OPTO Slotted sensors (2) / 0342-0987-0003 / So_lines (3) / 0342-0987-4001 / Buffers H6-H9 - / 0342-0997-3001 / ORIENT Sensor (2) / 0342-1000-4001 / Powers I / O H-4 (2) / 0342-1013-4001 / Endstations MPV H-2 (1) / 0342-1027-0002 / High current MTR Driver (2) / 0342-1027-4001 / PCB (7) / 0342-1033-4001 / Isolation buffers (1) / 0342-1049-0001 / Scan generator Horiz (1) / 0342-1049-0003 / Scan generator Horiz (2) / 0342-1050-0001 / Scan generator Vert (1) / 0342-1050-0003 / Scan generator Vert (1) / 0342-1051-0001 / Scan clock card (1) / 0342-1052-0001 / Scan system K-5 (3) / 0342-1052-0002 / Scan systems K5 (3) / 0342-1053-0001 / Multi functionals K-6 (5) / 0342-1054-0001 / Front panels I / O K-7 (1) / 0342-1056 / BEAM Monitor unit 300 - / 0342-1069-2001 / Capacitive sensor (2) / 0342-1077-4001 / A24 (2) / 0342-1084-2001 / Card rack cables (2) / 0342-1101-4001 / Source datalink terms (2) / 0342-1142-2001 / Sensors D (2) / 0342-1312-1001 / Gas bottles (CGA 180) (1) / 0342-1331-0001 / Beam monitor backplane (1) / 0342-1334-0001 / PCB (1) / 0342-1340-0001 / Scan plate (2) / 0342-1363-0001 / High temp vaporizer crucibles (3) / 0342-1402-0001 / Scan amp HV Mods (1) / 0342-1386-0001 / Scope (1) / 0342-1403-0002 / Electronic mod assy (2) / 0342-1429-0001 / Magnet power supply (2) / 0342-1432-0001 / Filament power supplys - / 0342-1433-0001 / Source gas control module (1) / 0342-1435-0001 / Discharge power RE (3) / 0342-1446-0001 / Inner magnet liner assys (7) / 0342-1449-001 / Outer magnet liner assys (7) / 0342-1487-0001 / Scanner cable kits (1) / 039778 / Sensor A (2) / 040.5-DP / Bimba cylinders (4) / 0455-0001-0002 / Beeds (6) / 0469-0006-0002 / Bearings MFS 3KDD (4) / 0469-0007-0001 / Bearings Flg tapered (3) / 0470-0001-0001 / Thrust needle bearings (50) / 0471407501 / Inserts (4) / 0475-0012-0001 / Slit bellows (1) / 0478-0001-0001 / Upper bell lock (19) / 0483-0004-0001 / Timing belts (groove 56) (37) / 0483-0005-0001 / Timing belt (grooves 115) 5 / 16W 176704 - / 0483-0007-0139 / Timing belt (109) / 0547-0068-0001 / Graphite outer liner replacements (2) / 0547-0069-0001 / Magnet Liner blocks (2) / 0547-0076-0001 / Rod support blocks (2) / 0547-0092-0001 / Lower drive blocks (1) / 0567-0026-4001 / Extender board (5) / 0567-0052 / Relay panels (3) / 0567-0053-4001 / Beam current display drivers (6) / 0567-0064-4001 / I / O Switch interface (3) / 0567-0109-0001 / - (2) / 0567-0137-0001 / - (2) / 0567-0228-0001 / Ion gauge controllers BD (1) / 0567-0230-0003 / Endstation controllers (1) / 0567-0230-0008 / MPU (1) / 062 4E1 36 / Humphrey (38) / 0762-0031-0004 / Linear bearing super, 8" (9) / 0762-0060-0001 / Plastic bushing assy (1) / 0781-0020-0002 / SEO Cable Assy (6) / 0781-0133-0001 / Vaporizer cables (1) / 0781-0307-0001 / Photo interuptor (1) / 0781-0329-0001 / Home sensor cable (1) / 08060020001 / Load lock cam 7-27 (157) / 0843-0007-2001 / End cap non 2Sunk (7) / 08484001 / 350D Ion source, 2" (5) / 0854-0001-0001 / DI Water filters (6) / 0854-0004-0001 / Differential seals (2) / 0854-0005-0001 / Seal cartridges (20) / 0871-0002-0001 / Catch flanges dorlec DLH-067 (3) / 0895-0005-4001I / Arc Chambers improved (5) / 0896-0005-4001 / Standard arc chambers (3) / 09-04399 / Power distributions (3) / 09-04433 / I / O Expansions (1) / 0906-0089-0001 / Ion gauge controller old style (4) / 0906-0191-0001 / 6200 / A Chamber vertical motor driver Retrofits (1) / 0906-0235-0001 / Ion gauge controller (1) / 092-DP / Bimba 092-DP (28) / 0951-0003-1001 / Filament clamp (30) / 0981-0005-1001 / Filament support collars (1) / 100.019.006 / Part (1) / 100-005-018 / Flange cartridge (1) / 100-010-304 / Interior arm load, 6" (4) / 100-010-330 / Arm, 6" (1) / 100-019-007 / Tool (1) / 100-019-008 / Tool (1) / 100-019-026 / Plate (1) / 100-019-027 / Plate (1) / 100-019-028 / Plate (2) / 100-019-029 / Tools (8) / 1001-0016-0001 / SKM Electrode connectors (2) / 10020721 / Seal pumps - / 10040-PE44-0003 / Vat valve (1) / 1007-1063 / I / O Process transport (2) / 100B110 / Flow switchs (1) / 101-0692 / Motor (1) / 1020 / Modulas one (1) / 1027-0068-0001 / Cell controller (133) (1) / 103-540-26 / SANYO DENKI 103-540-26 Motor stepper assy Z (1) / 1046-TE44-1032 / Cat valve (4) / 1062DVS-3.00-1 / Beam Shutter cylinders (1) / 1066-0002-0001 / Coupling flexible (8) / 1066-0006-1001 / Open crucible couplings (3) / 1066-0007-1001 / Closed crucible couplings (1) / 1066-0036-0001 / Coupling pump (2) / 107375001 / U44 EPROM 9 / 18 / 92 (7) / 1097100 / Source gates (14) / 1097101 / Source gate shims (1) / 10C19B4-1 / Valcor valve, 115 V, 60 Hz,10 W (1) / 10PS-P10 / Sprague 1UF 1KV Non Polarized capacitor (1) / 1100001 / Kaiser tank (1) / 110-0012-0038 / Shaft coupling (1) / 110-003-002 / Main clamp ring (30) / 110-003-019 / Pivot bearing caps (14) / 110-003-064 / Washers browns (15) / 110-003-065 / Ball bearings (3) / 110-004-001 / Timing belts (1) / 110-004-082 / Idler bearings (12) / 110-004-158 / Cam base spacers (15) / 110-004-159 / Cam followers (1) / 110-004-161 / Tilt cam follow shafts (3) / 110-005-004 / Lift rods (7) / 110-005-016 / Cartridge bot flanges (1) / 110-005-017 / Differential seals (6) / 110-005-018 / Cartridge top flanges (7) / 110-005-020 / Seal reainers (13) / 1100054 UA740C / OP amp ua740c (7) / 110-006-001 / Bearings KAA15XL0 (5) / 110-006-009 / Spacers - / 110-006-016 / Shaft (1) / 110-006-023 / Plate arm mounting (6) / 110-007-0032 / Cam followers (1) / 110-007-023 / Main drive system block (4) / 110-007-028 / Micro slides (2) / 110-007-029 / Precision bearings (7) / 110-007-030 / Bearings (20) / 110-007-044 / Springs 6200 (2) / 110-007-051 / Align rod couples (1) / 110-007-179 / Mod bod cam load lock (1) / 110-009-008 / Vert ballbushing (10) / 110-009-009 / Horizontal ball rods (5) / 110-011-002 / Shafts 110-011-002 (1) / 110-012-016 / Bearing screw shaft (5) / 110-012-052 / Bearings (4) / 1100310 / Arc current power supplies (1) / 1100311 / Arc power supply (2) / 110040630 0692-0001-0001 / Silver brushes for rawson-Lush gaussmeter sets - / 1100440 / Ceramic 20KV Feedthru - / 1100820 / Vaporizer (2) / 1101490 / V2 Source valve complete assorted styles (3) / 1101518 / Vaporizers P.S (1) / 11017 / Microprocessor F9 (7) / 1101850R / Analyzer magnet P.S. master and slaves (1) / 1101860 / Source magnet power supply - / 1102040 / Source blankoff (2) / 1102200 / 80 kV Water baffles (1) / 1102220 / water flow meter (10) / 1102460 / Extraction electrode assys (2) / 1103600 / AMU Controllers B (2) / 1103670 / Sliding seal plates (6) / 11038800 / Waveguides (1) / 1104130 / High voltage resitor assy (1) / 1104430 / Y-Scan monitor panel (2) / 1104900 / Accel / Deccels P.S (6) / 1105172 / V17 Valves (2) / 1105440 / Gas controls (6) / 1105441 / Leak valve acuators assembly (3) / 1105670 / Leak valve acuators assembly (1) / 110567-001 / Z80 Processors (7) / 1105840 / Disk sensors BD 2 (1) / 1105950 / Rotary drive (3) / 1107000 / Disk faraday assys (2) / 1107130 / Door steppers P.S (3) / 1107320 / AT-4 Steppers P.S (2) / 1108180 / Rotating stage motor assembly (2) / 1108181 / Rotating stage motor assembly (1) / 1108700 / Control power assy (2) / 1108760 / Status display panel - / 1108880 / Seal assy part (2) / 1110390 / Power supply, 12 V, 50 A (1) / 1110410 / Accel electrode complete (8) / 1110542 / Flag assy (1) / 1111920 / AMU controller (1) / 1112290 / Remote beam con (10) / 1112350 / Waveguide outer linear assy (1) / 1112540 / gas box controller (2) / 1112560 / Flood power supply (1) / 1113630 / Slit flag (3) / 1115040 / Dose controller (1) / 1115100B / Back cover vacuum controller (1) / 1115100F / Front panel vacuum controller (1) / 1115150 / Shorting bar (1) / 1115610 / AMU Controller (1) / 1115620 / AMU Controller (3) / 1115930 / Beam controller (1) / 1115970 / Light pipe com (1) / 1116341 / Input vac chuck 6 in assy (1) / 1116600 / Vaporizer power supply (1) / 1116750 / Remote disk beam controller (2) / 1119160 / Soure beam controller (2) / 1120805 / Wafer stage (2) / 1121150 / Flood power supply (178) / 1121406 / Copper gasket (2) / 1121450 / Control power assy (15) / 1121510 / Disk grounding kit (1) / 1122000 / Surpression P.S. (1) / 1125470 / Chamber door sensor (22) / 1127550 / Source For 10-80 / 160 No Vaporizer (8) / 1131407 / Filament single med current feedthru (1) / 1132161 / Remote Terminal beam controller (1) / 1132191 / Remote vac beam con (1) / 1132221 / Remote disk beam con (1) / 1132230 / Source beam controller (2) / 1135882 / AT-4 Assembly (2) / 1137410 / AT-4 Alignment sensor (1) / 11377 / Modulas One 1020 (1) / 1139120 / Disk cooling plate (10) / 1152240 / Vaporizer heat shield (2) / 1152620 / Crucible assy. - / 1152970 / Actuator gas box (3) / 1153040 / source control (1) / 1153430 / Accel wire (1) / 1154030 / Dual vaporizer source (1) / 1154830R / Screw driver assy (1) / 1155820 / DI Power supply 24 VAC - 24 VDC (1) / 115673001 / U1 EPROM (1) / 115673002 / U2 EPROM (10) / 115866 / Copper, 69" OD 1in OD 2in L (26) / 1159060 / Pin contact sub plate disk hub (2) / 116201001 / EPROM U42 REV 1 VO.15 5 / 10 / 96 (2) / 116202001 / EPROM U43 REV1 VO.15 5 / 10 / 96 (2) / 116203001 / EPROM U44 REV1 VO.15 5 / 10 / 96 (2) / 116204001 / EPROM U45 REV1 VO.15 5 / 10 / 96 (1) / 116223001 / Double main EPROM V020 (1) / 116223002 / Double main EPROM V020 (1) / 116227001 / TB EPROM V.020 (1) / 1166-0012-0002 / Magnet term datalink (3) / 1162800 / Exchange arm (6) / 1163720 / Source mounting flange (3) / 1164410 / Electron shower 4 (4) / 116441011 / Electron shower V 3 (1) / 1165270 / Valve cylinder V6 - / 1165730 / High voltage probe (1) / 1167070 / Hub disk (2) / 1167810 / Loading disk plate (1) / 1167930 / Dual Enhanced Vap 160KV M2732AFI (4) / 1168460 / Proximity switch assy - / 1169073 / Rotary drive cont (1) / 1172530 / Source can (4) / 1174390 / Interlock switch assembly (3) / 1176920 / 10 Turn pot 2K Ohms (1) / 117883 / Breaker with groung fult protection 15A 120V (1) / 1180740 / Belt drive cooling tube (1) / 1182480 / Extration manilulator assy (1) / 1186221 / Feedthru plate (1) / 1190031 / Gyro cont (1) / 1192020 / 125 mm Modular wafer pickup arm - / 1192420 / Granville-Phillips stabil-ion vacuum measurement system (3) / 11SM1-T / 11SM1-T Switch (4) / 11SX21-T / MCRSW (7) / 11TS152 / Switch 11TS152 (488) / 1200320 / Filament insulator insert (332) / 1200321 / Filament insulator insert B (9) / 1200470 / Linear bearing (3) / 1200B / Beam monitor scope (5) / 1201340 / Bearing liner (4) / 1201350 / Liner bearing (1) / 1203019 / (9) Cherry MO Cap Key (9) / 12033800 / Bolts (3) / 1205000 / Filament supply for 20A EMS 7.5V - 30 (3) / 1210-90181 / Fixed 50W Resistor (2) / 1214130 EMS 600V-1.6A-2-D-1286 / EMS 600V-1.6A-2-D-1286 (1) / 1215D12H / DC / DC Converter (1) / 123 / Scan feedthru (1) / 1298-0001-1204 / Diode IN1204 (8) / 130.002.034 / Platen 2 (6) / 130.005.002 / Platen drive belt (1) / 130-018-053 / AV Target (1) / 13-75-1-D / EMS power supply 13 V, 75 A (1) / 140012 / Light pipe system (8) / 1400630 / Log radio module (2) / 140-40-017 / Load lock cover (10) / 140-415-097 / Clippard minimatic (1) / 1417620 / Gasbox control DI (1) / 141A-14319 / MKS Vacuum switch type 141 (1) / 144001-6D / Eprom U28 (1) / 1450303 / Sensor G (6) / 149F1 / AT4 149F1 (1) / 1500010 / I / V Converter (5) / 1500070 / Arc Current (1) / 1500080 / Slew control-dosemeter (1) / 1500180 / I / O Port J2 (1) / 1500181 / I / O Port J2 (2) / 1500183 / I / O Port J8 (5) / 1500191 / Analog extension module J2 (1) / 1500200 / Control panel readout (7) / 1500290 / Vaporizer temperature control (1) / 1500301 / Status display (2) / 1500360 / Universal 50 Pin interconnect (3) / 1500460 / Disk faraday filter (2) / 15-00475-00 / Seal (4) / 1500482 / Analzyer and source magnet supply (3) / 1500510 / Timer driver (2) / 1500530 / Temp limit control (2) / 1500600 / AMU Front panel (14) / 15006-1 / 1 / 8 Pipe To 10-32 (5) / 1500610 / IC and Cryo temp (3) / 1500620 / Logarithmic A / D Converter (10) / 1500640 / Emission control A-8 (2) / 1500650 / Mother board (3) / 1500660 / I / O Vacuum controller (3) / 1500670 / Motherboard vacuum controller (3) / 1500680 / Status display vac control (8) / 1500690 / Grid power supply (3) / 1500700 / Alpha numeric display (4) / 1500740 / Thumbwheel switch (1) / 15007440 / AMU Remote (7) / 1500830 / Current volt converter (5) / 1500840 / Keyboard (5) / 1500850 / Alpha numeric display (3) / 1500870 / P2 (5) / 1500940 / Input buffer (1) / 1500970 / Flat sensor-collector (1) / 1500980 / Flat sensor-emitter (2) / 1500990 / Vaporizer control motherboard (4) / 1501000 / Power control vaporizer (3) / 1501020 / Electrode suppression sense (1) / 1501030 / Filament supply control (3) / 1501040 / Electrode divider readout (8) / 1501060 / Counter / Timer A-8 (2) / 1501061 / Counter / Timer fast scan (2) / 1501070 / Filter (3) / 1501110 / Disk sensor BD 1 (1) / 1501142 / Motherboard (1) / 1501150 / Analyzer magnet supply (6) / 1501200 / A17 Vacuum controller (4) / 1501210 / PCB (3) / 1501250 / Status display pcb (1) / 1501270 / Faraday burn-thru sense (3) / 1501280 / Input / Output cassette to cassette A-7 (1) / 1501290 / Led rotary drive (2) / 1501300 / Input I / O 80 (2) / 1501310 / Input TO 990 / 305 (3) / 1501320 / Output buffer (5) / 1501330 / Stepper motor output interface (5) / 1501360 / AT-4 Data acquisition (1) / 1501390 / Electron flood control panel (1) / 1501400 / Endstation front panel display (9) / 1501420 / IDX Sensor assy (1) / 1501490 / Data acquisition power supply (3) / 1501500 / Universal mother bd (1) / 1501620 / Data transceiver board (3) / 1501650 / CRT Interface (1) / 1501660 / Stepper motor driver (2) / 1501670 / 1 Channel transceiver (2) / 1501700 / Controller datalock slave (5) / 150171 / Minipulator assy (2) / 1501720 / Beam controller front panel input card (3) / 1501820 / Datalock / Slave opoisolator (1) / 1501870 / Remote Vac controller I / O (4) / 1501990 / Keyboard (1) / 15020300 / Plunger pos sense (2) / 1503010 / CPU TM990 / 101 (16) / 1503020 / I / O TM990 / 310 E.S. A-8 (5) / 1503040 / Memory board TM990 / 201-42 (8) / 1503060 / Controller remote (1) / 1503061 / Controller remote board (8) / 1503070 / Beam controller remote I / O (2) / 1503100 / Output buffer A-1 (7) / 1503180 / Beam remote controller (1) / 1503190 / Electron shower PCB (4) / 1503220 / Memory expansion (5) / 1503230 / Antilog A / D (1) / 1503440 / Gas box controler back (1) / 1503750 / Electrode suppression P.S. (4) / 1503901 / Z80 Controller (1) / 1503920 / Power fault detector (2) / 1504030 / I / O Remote vac controller (3) / 1504080 / Cassette stepper controller (5) / 1504090 / Flat sensor collector (5) / 1504100 / Flat Sensor emitter,150 mm (5) / 1504130 / Isolation inter-connect (2) / 1504180 / EMO Remote (4) / 1504260 / Electrode surge protection (2) / 1505420 / Pneumatic switch (4) / 1505430 / Speed controller (1) / 1505480 / Power fault interrupt generator (2) / 1505490 / Optoisolator (1) / 1505500 / Electron shower - / 1505561 / Front panel beam controller (3) / 1505580 / Beam controller remote I / O B (4) / 1505650 / Faraday Sensor (1) / 1505710 / AMU Front panel B (3) / 1505720 / AMU Ground level (3) / 1505750 / Output buffer (3) / 1505771 / AMU Front panel D1 (3) / 1505810 / Data concentrator (1) / 1505950 / Remote log A / D Board (1) / 1505951 / Remote log A / D (1) / 1505960 / Remote emissions controller (1) / 1507360 / Vac AMU Tranceiver (10) / 1507380 / Exchange interface (2) / 1507440 / AMU Remote A (23) / 1515577 / Defining aperture A (7) / 1516900 / CPU TM 990 / 101MB (1) / 1517410 / Terminal electric rack D.I. (1) / 1517660 / 180 Cont remote (1) / 1517820 / Dedicated buffer board (1) / 1518150 / AT-4 Data acquisition (1) / 1519190 / Beam controller I / O (1) / 1519313 / Analog I / O (1) / 1519350 REV C / I / O Vavuum controller (1) / 1519520 / Power distribution device interface (1) / 1519540 / Flag faraday filter (1) / 1520130 / Interconnect (1) / 1520210 / Baised output - / 1520420 / Arm control (2) / 1520601 / Universal dose controller (1) / 1521300 / Dose cont filter power (2) / 1521840 / Remote VAC Controller I/O (1) / 1522250 / Master oscillator (1) / 1522920 / TC and cryo interlock board (1) / 1523280 / Creonics ES encoder filter piggyback (4) / 1523530 / EMI Power supply control (5) / 1550-0001-3001 / Electrode extraction (1) / 155-000-062 / Rotor Union 1-14 (8) / 1550-0013-3001 / Decel Electrode (4) / 1550-0016-0001 / Filament Electrode (23) / 1550-0017-0001 / 3 PC ARC CHAMBER TOP (9) / 1550-0036-0001 / High Voltage Aperture (1) / 1550-0037-0004 / Face Plate 2 (2) / 1550-0038-0001 / High Voltage Electrode (1) / 1550302 / Sensor (1) / 15532116 / TAPE DRIVE AND NEW TAPE (3) / 156-0067-01 / IC (7) / 157 D / Vacuum Controller Eprom 80KV (3) / 15A 125V / Hubbell 15A 125V Male Socket (1) / 15S0303 / V Notch Emitter (1) / 1600046 / TM990 / 305 Endstation A-10 (1) / 1600700 / Cable extention (1) / 160-608-008 / Shaft Anti Torque (2) / 160-608-048 / Shaft Ball (1) / 1613191 / CABLE FLAG FDAY (3) / 1621421 / CABLE FILMENT PS (1) / 165L / TIMING BELT (1) / 1700141 / Filament Feed Thru Left (28) / 1700240 / Vespel Spacer (6) / 1700310 / .625 Filament Clamp (1) / 170033150 / VAP PART (1) / 1700340 / ball screw ass shaft (4) / 170065 / Gasket foam (4) / 1701450 / Sliding Seals (4) / 1702040 / accel / deccl (25) / 17021870 / Electron Shower Filament Aperture (16) / 1703110 / FLEXURE (6) / 1703150 / SPCR FLEX (16) / 17032100 / Beam Aperture (590) / 17032830 / Ceramic Filament Insulator (12) / 17033000 / Insulator H (15) / 17033030 / Feedthru Insulator (4) / 17033160 / Ball Joint (6) / 17033170 / FILAMENT FEED STARP (12) / 17033170B / FILAMENT STRAP (4) / 17033330 / Dual Vaporizer 1 1 / 8 Tread with Termocouples (2) / 17034610 / Cap Seal (2) / 17036670 / Dual Vaporizer Base Plate (24) / 17037280 / Faraday Flag Top Shield (11) / 17037280B / Source End Cap For 20A (12) / 17037290 / Source End Ring (3) / 17037680 / ELECTRODE GROUND PLATE (21) / 17037760 / Low Voltage Aperture (4) / 17037900 / FERRO-CERAMIC INSULATOR (2) / 17037940-B / EX SHEALD (48) / 17038680 / pin 1 / 4 dia vesper (15) / 17043870 / .4 filament clamp (1) / 17046020 / BLANK OFF PLATE (14) / 17046670 / Mod. Single Gas Base Plate (29) / 17048870 / Face Plate groove (1) / 1704940 / Curved Field Block (3) / 1704990 / Arc Chamber Side Plate - / 1705000 / Dual Gas Base Plate (5) / 1705001 / Single Gas Base Plate (3) / 1705360 / DISK HUB (4) / 17055991 / VLV COVER (4) / 17059460 / Screw Plug (1) / 17059980 / (2) / 1706000 / SPR TRSN DISK EXCH (40) / 17062340 / High Energy Electrode (17) / 17062350 / HV Electrode Plate (1) / 17062500 / Graphite (1) / 1706370 / NOZZLE VAPRIZ (2) / 17063700 / GUIDE SET (1) / 17063730 / Lift Ring (5) / 1706380 / Vaporizer Nozzle (25) / 17064260 / Ground Electrode Plate (3) / 1706440 / Filament sHIELD OB (4) / 17065300 / PLATE (9) / 17065360 / Faraday Flag Aperture (6) / 1706540 / INSUL BSHG 8 (35) / 17066871 / PLT Strike Faraday VG (1) / 17068110 / brkt proximity switch (3) / 1707-1 / KINGS 1707-1 RF / COAXIAL SHV JACK STRAIGHT CONNECTORS (1) / 17074630 / Blank Off Plate 2.25 Dia (60) / 1707760 / Filament 10-80 (9) / 17079740 / GF BEARING FOR EXTRATION (6) / 1708220 / AT-4 BUSHING (1) / 17083020 / Filament mounting Block Ins (6) / 17083680 / End Plate 2 (1) / 1708520 / Graphite (12) / 1708670 / End Plates (1392) / 1708680 / Insulator (2) / 17087480 / APERTURE ACCEL ASSY 160K (20) / 17097240 / Insulator c (2) / 17099181 / Faraday Aperture VT1 (2) / 17099200 / GF (2) / 17099201 / Strike Plate (7) / 17099631 / Inner Beam Dump VGI (2) / 17099671 / Outer End VGI (1) / 1709980 / Cylinder Short Stroke DA61R1M (1) / 17099831 / Shield Faraday Cup (4) / 170-L075 / TIMING BELT (1) / 17100120 / Pipe Gas Teflon EX Term Gap (126) / 17100430 / Repeller Plate (2) / 17100521 / Exit Dump VGI (2) / 17102611 / Aperture Resolving (4) / 1710590 / Feralflulidick Seal (1) / 17106471 / Strike Plate 3 (1) / 17106491 / Strike plate Graphite (1) / 17106501 / Strike plate 2 (3) / 17107540 / Centering Plate (2) / 17107630 / BEAM APERTURE (4) / 17111780 / Outer Dump (2) / 17111800 / Outer Duct 5 (1) / 17111810 / Inner Duct 5 (2) / 1711190 / extaction clamp (43) / 1711261 / Large Cup (64) / 1711262 / Small Cup (1) / 17115410 / Faraday Vitr Aperture (1) / 17115510 / GND PLT FEED THRU CON - / 17115930 / Linear Accelerator Aperture (4) / 1712040 / Graphite Bearing (19) / 1712070 / Ground Electrode (6) / 17121740 / REPELLER (7) / 17121750 / INNER CUP SHIELD (2) / 17122890 / Graphite Shield Outer Exit (1) / 17122940 / Post Accel Aperture (1) / 17122970 / Resolving Housing Aperture (7) / 17123430 / Retainer (14) / 1712390 / Electrode Standoff (2) / 17124230 / Wear Ring Chamfered (1) / 17124240 / WEAR RING DISK VAC - / 17125561 / Face Plate graphite (1) / 17126830 / GSD 200 GF SHIELD (10) / 17127600-1 / 4 in Input Chuck (1) / 17127630 / HEAT SHIELD VAPORZER (3) / 17127840 / Feedthru Insulator (1) / 17128110 / Face Plate 15R (1) / 17128250 / Shield (1) / 1712960 / Vaporizer Crucible (2) / 17129700 / Faraday Strike Plate (3) / 17129710 / Faraday Strike Plate (3) / 17129720 / Faraday Strike Plate (3) / 17129730 / Faraday Strike Plate (37) / 1713040 / Source Shield (18) / 1713050 / End Plate (2) / 17132290 / High Voltage Aperture (1) / 17133400 / ELS Standard, Without Vaporizer Ports, .140 Dia. Repeller Hole Arc Chamber (5) / 1713410 / SOURCE GLASS WINDOW (1) / 17135430 / E-Shower Housing Liner (2) / 1714110 / CLAMP (2) / 1714970 / BSHG Graphite (12) / 1715230 / SILVER STRAP (6) / 1715240 / Copper Filament Post (4) / 17158000 / S-1.5X 1 Pc. Lean Cathode, Tungsten, 7mm Thick (8) / 17168950 / Insulator Shield (2) / 1717480 / Face Plate (27) / 1717950 / Beam Aperture (13) / 1718290 / Reflector E-shower (7) / 1718300 / Ecetron Shower Filament Insulator (13) / 1718600 / WATER TUBE (1) / 17189120 / Filament GSD (17) / 1718960 / Filament Mount (1) / 17192210 / GSD ELS Filament Support, Right (1) / 17192211 / GSD ELS Filament Support, Left (1) / 171944 / SOURCE RING CLAMP (1) / 171-R / AIR CYLINDER FOR LARGE VALVES (1) / 17208650 / GSD Source Liner (4) / 1722A / Fluke 1722A (2) / 1723250 / CUP INSRRT (1) / 1723340 / Faraday Flag Insulator (1) / 17234230 / Flexible Connector (12) / 17254990 / Long Spring (1) / 17272300 / Shield Tube VG Select Aperture (1) / 17285600 / Accel Liner (1) / 17287850 / ELS Filament .040 (8) / 17287851 / ELS-2X Filament (6) / 17287860 / Cathode Support Plate (5) / 17287870 / Insulator Mounting Block (2) / 1730130 / CLAMP PLATE (93) / 1732990 / Waveguide Liner Block (14) / 1733000 / CLAMP BODY (7) / 1733010 / Clamp Lock - / 1733760 / FIX MTG BAR (3) / 1733940 / DEFFING AP - / 1734000 / BEAM DEFINING (1) / 1739150 / Vaporizer Nozzle Retainer (2) / 1739160 / Vaporizer Nozzle Long (12) / 1739470 / MTG PLT GND PIN (36) / 1740090 / Beam Defining Plate (6) / 1740096 / AIR VALVE (9) / 1740100 / Valve Boot (10) / 1740120 / Outside Radius Block (11) / 1740130 / Beam Strike Platte Shield (52) / 1740290 / Gas Feed tube (5) / 1740291 / Enhanced Gas Feed Tube (5) / 1740330 / Beam Aperture (1) / 1740530 / Ground Electrode 2 (2) / 1740680 / Aperture (1) / 1740760 / Insulator A - / 1740760-1 / New Style Insulator Kit (6) / 1741070 / Accel Aperture 2 (3) / 1741080 / Accel Aperture 3 (8) / 1741090 / APERTURE ACCEL 4 (2) / 1741430 / Insulator P (3) / 1741440 / Insulator Block (15) / 1744520 / Burn-Thru Sensor (8) / 1744550 / Beam Plate (2) / 1744570 / Standoff Insulator (4) / 1744620 / CLG PLT ASSY (2) / 1745100 / Power Supply 100A Control Console (1) / 1745112 / BEAM CONTROLLER (2) / 1745116 / SPRING (5) / 1745670 / Accel Aperture (1) / 1749640 / MAGNETIC DEFLECTOR MAGNET (4) / 1754620 / Accel Insulator Ring (8) / 1754640 / v-2 mount LARGE (5) / 1754650 / V-2 CLAMP SMALL (6) / 1755410 / Wear Ring (12) / 1755620 / RTNR (15) / 1755630 / Disk Grounding Disk (28) / 1755690 / clamp source adaoter (1) / 1755700 / Source Clamp (4) / 1766531 / Burn Thru VT1 (7) / 1769050 / ES INS (2) / 1769070 / Electron Shower Plate (17) / 1769100 / Electron Shower Bias Plate (8) / 177602GN / TWO PLACE TUMBWHEEL SWITCH (7) / 1783430 / Spacer Cap (4) / 1789800 / Filament Clamp (32) / 1789810 / End Plate 1 (28) / 1789830 / Reppeller Plate Square Corner (690) / 1789840 / Repeller Retainer Insert (515) / 1789850 / Pigtail Filament (29) / 1789870 / Arc Chamber Mounting Plate (505) / 1790420 / Repellor Shield (1) / 1792740 / Bracket Desk Top Extension (3) / 1796720 / Quad Shield (138) / 1799190 / PUSH ROD CLPLESS DISK - / 1799230 / WAFER CLIP - / 17992390 / Wafer Clip (9) / 17A0734 / Expansion Strap (13) / 17A0735 / SILVER STRAP (9) / 17A2270 / SPACER (3) / 17A4229 / BUSH (2) / 17A4230 / INSULATOR G (4) / 17C9720 / Accel / Deccel Extraction Electrode (2) / 17E1438 / ELS SHIELD PLATE (1) / 1820610 / Hub POGO Pin Tool (4) / 1822540 / aliment disk (2) / 1822550 / Exchange Arm Setup Fixture (1) / 1829410 / Rotor Install / Removal Tool (1) / 1833940 / Ring Rotor Fixture (4) / 18722 / 65681 / RCA Scan Amp Mod (1) / 18S0451 / 18s0451 (1) / 18S0452 / block (1) / 1900050 / Thumbwheel Switch AMU (5) / 1900340 / MAGNETS (16) / 1900400 / Electron Shower Filament (1000) / 1900400-1 / Filament .19 Flat (6) / 1900480 / INA 10539 Screened Aperature (1) / 1905090 / ACDC 200A 5V Filament P.S. JF101G-2000-9032 - / 1907720 / Ball Screw assy (1) / 1915110 / Air Interface (1) / 1919A02580 / Power Supply 5VDC 60A (2) / 1952-0015-0002 / INSULATOR E (2) / 1952-0041-0001B / 8200 FeedThrough (3) / 1952-0042-0001 / Scan Suppressor Feedthrough (4653) / 1979-0001-1001 / Filament (18) / 1979-0004-0001 / SKM 2% Thoriated Filament (5) / 1990-0001-0001 / 1Amp Line Filter (5) / 1990-0056-0001 / U7 Endstation Cont. V4.4 (3) / 1990-0056-0002 / U8 Endstation Cont. V4.4 (2) / 1999-0069-0001 / 6200AV MPU H2-U7 (1) / 1999-0069-0002 / 6200AV MPU H2-U8 (1) / 1999-0071-0001 / 6200A MPU H2-U7 (2) / 1999-0071-0002 / 6200A MPU H2-U8 (26) / 1999-0073-0001 / US Motor Cont. V4.5B (6) / 200 / SELONOLD (1) / 2000520 / Variac Brush Kit (1) / 2000554 / PCB 1629 (5) / 2003 / Dwyer Magnehelic Pressure Gage 2003 (1) / 2010-0089-2001 / Source Suppression Flange (5) / 20611 L7-109 L300 GP2V / temp switch (1) / 20SD / SENSOR P (1) / 2100010 / 5VDC In / 12VDC Out Converter (1) / 210-031 / Home Made (1) / 210-063 / Bellows Brass (54) / 210080 / Reainer pin Assy (1) / 210-100 / DP HEATER PLATE (2) / 210-109 / Capacitor .02mfd 20KV (2) / 210-16-0B / Souce Vsporizer Heater Controller (1) / 210L075 / TIMING BELT (1) / 2114 / Driver PCB PD Motor 115VAC (10) / 22120120-001 / CPU TM990 / 100MA (3) / 2300002C / Translator TBM105-1218 (2) / 2326-0004-0001 / GASKET GAS FITTING (3) / 2326-0012-0001 / GASKET GAS FTG (1) / 23272009 / 0 / D / A Converter ASM (2) / 2345 / GAS BOX VALVE CON (1) / 248981-001 / System Memory (6) / 250A 3 10 21 / Boost Valve (1) / 26328-KA41-1002 / 0365 / Vat Valve (1) / 26-362-70-0247 / Air-5 Way Valve (7) / 270 / Ion Gauge Controller 270 (4) / 275071 / Convection Gauge (94) / 2866009 / Ceramic Standoff 1inx1 / 2in 8 / 32 (4) / 297240 / Table (1) / 2K RESISTOR / 2 K FOR GAS BOX (1) / 2N1847 / 913 / Diode (37) / 2N3773 / 2N3773 Power Transistor (23) / 3 / CLAMPS FOR LENS (6) / 3 / 4 IN ION GAUGE F