판매용 중고 AVACO Blank mask sputter for 1600 x 1440 mask #9395194

(4) SHIMADZU TMP-2304LM Vacuum chamber: Load lock / Unload chamber (2) Transfer chambers Process chamber Conveying system: AC Servo drive Upper magnet guide + Lower roller drive vertical transfer and film formation Sputter system: (2) EN TECH PROFIBUS DC / Pulsed DC Power supplies for Cr Deposition (2) Planar type cathodes Film forming method: Mobile membrane Substrate transfer type: Vertical transfer, Inter-back type Vacuum exhaust system: (2) EDWARDS IXL500Q Dry pumps (2) CTI-CRYOGENICS SP-HPM40LQJIS Cryo pumps (6) LEYBOLD MAG W2201IPL Turbo molecular pumps Vacuum piping Utility system: PCW CDA N2 General exhaust Process gas Power system: 3 Phase, 60 Hz, 208 V ±5% Substrate: Board size: 1600 mm x 1440 mm, 5-10t Substrate: Soda-Lime, Quartz Loader zone: Base manual transport / Handling by MGV Carrier loading: Roller drive (Vertical) Shooting and depositing material: Chromium Chrome oxide Chrome nitride PLC Platform: MITSUBISHI Series-Q PLC Communication standard: Profibus MFC and Type: 36 MFCs, Digital MFC(AZBIL) Operating system: Windows 7 2017 vintage.