판매용 중고 ASM Lot of spare parts for Eagle 10 #9313721
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ID: 9313721
Qty / Part number / Description
(2) / 70055-00925A / Shield plate
(1) / 70021-03924A / Ar PRG C/RC1
(10) / 91233-32024 / Gaskets, UPG-6.35G (SUS)
(2) / NJB637008 / ITO800 TEOS Traps
(1) / 70050-70103 / Assy / Heater reproduce
(1) / FC-7800CD-4V / MFC N2O (3 slm)
(2) / 70055-00713 / View ports glass (sapphire window)
(2) / 70055-70656C / Top plates, 8" for SiH4
(7) / 70055-70213B / Screw caps
(6) / 95406-71001 / Inconel bolts / VIB 4 x 16 mm
(3) / 70055-70574 / Set screws M3
(3) / 70055-70573 / Pins support rod
(4) / 91361-00004 (F201) / O-Rings VITON P-385
(3) / 5641A1275SS639 / O-Rings CHEMRAZ SS639 bonded slit valve
(2) / 99769-R1(01034-KE24-AAR1) / Seals / VAT Made gate valve seal kit
(4) / P-300 / O-Rings VITON P-300
(3) / P-315 / O-Rings VITON P-315
(4) / V-15 / O-Rings VITON V-15
(4) / V-70 / O-Rings VITON V-70
(6) / G-30 / O-Rings VITON G-30
(2) / V-24 / O-Rings VITON V-24
(2) / G-80 / O-Rings VITON G-80
(3) / AS568-166 / O-Rings VITON AS-166
(1) / 91361-00308 / O-Ring DUPRA DU351 DPN01_1_P385
(2) / 91361-00322 ( V70 ) / O-Rings DUPRA DU351 DVN01_1_V70
(2) / 91361-00319 ( G30 ) / O-Rings DUPRA DU351 DGN01_1_G30
(2) / 91361-00294 ( NW40 ) / O-Rings DUPRA DU351 DNN01_1_N40
(1) / 91361-00293 ( NW50 ) / O-Ring DUPRA DU351 DNN01_1_N50
(1) / 91361-00290 ( AS568A-136 ) / O-Ring DUPRA DU351 DAN01_1_136
(1) / 91361-00292 ( P22 ) / O-Ring DUPRA DU351 DPN01_1_P22
(1) / 91361-00291 ( P49 ) / O-Ring DUPRA DU351 DPN01_1_P49
(1) / 91361-00306 ( P300 ) / O-Ring DUPRA DU351 DPN01_1_P300
(1) / 91361-00307 ( P315 ) / O-Ring DUPRA DU351 DPN01_1_P315
(12) / M5x20-A / Nickel bolts
(1) / 91361-00010 (V-40) / O-Ring VITON V-40
(2) / AS568-360 VITON / O-Rings VITON AS-360
(1) / WG3NS3FF2 / Wafer guard (3) NF-30 gas filter connecter, 1/4" (VCR)
(1) / WG3NSMFF2 / Wafer guard (3) NF-micro gas filter connector, 1/4" (VCR)
(1) / FWBR-71-6.35 / Pneumatic valve
(2) / NW-16 / O-Rings VITON NW-16
(5) / FPR-UDDF-71-6.35-2-NL / Air operate valves
(1) / FUCL-715-6.35-0.07-SI / Check valves
(1) / NASCLEAN / N-30 1/4" with VCR L=71 / Gas filter
(1) / 70021-03928A / Ar PRG C/RC2
(1) / FC-780C-4V / MFC SiH4 300 sccm
(1) / 65209-01 / Bonnet seal for S01(DN40)
(2) / VX-54-1A3 / Microc switches
(6) / 70055-70174A / Cylinder head screws M4x8.
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