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ID: 9270897
웨이퍼 크기: 12"
빈티지: 2007
12"
Process: P-TEOS, SiO, SiN
(2) FI20620-1 Remote Plasma Sources (RPS)
ADVANCED ENERGY APRX3013 RF Generator
PCB’s:
Slot1 / CDN491
Slot2 / CDN491
Slot3 / CDN491
Slot4 / CDN496
Slot5 / CDN496
Slot6 / Interlock module
Slot7 / Interlock module
Slot8 / SIG COND
Gas configuration:
Make / Model / Gas / Maximum flow
UNIT / IFC-125 / NF3 / 15000 sccm
UNIT / IFC-125 / Ar / 10000 sccm
UNIT / IFC-125 / SiH4 / 1000 sccm
UNIT / IFC-125 / NH3 / 700 sccm
UNIT / IFC-125 / N2 / 25000 sccm
UNIT / IFC-125 / Ar / 10000 sccm
UNIT / IFC-125 / O2 / 10000 sccm
UNIT / IFC-125 / N2O / 1000 sccm
UNIT / IFC-125 / N2O / 15000 sccm
UNIT / IFC-125 / Ar / 15000 sccm
STEC / LF-A40M-A-EVD / TEOS / 7g/min
2007 vintage.
아직 리뷰가 없습니다