판매용 중고 AMAT / APPLIED MATERIALS Chamber for Endura II #9393240
URL이 복사되었습니다!
확대하려면 누르십시오
ID: 9393240
웨이퍼 크기: 12"
빈티지: 2008
12"
Process: Metal WSI
Part number / Description
0040-82892-001 / 0040-64040 / Source assy
- / Magnet
0040-81104 / Adaptor
0020-45649 / Camber body
3310-00073 / Manometer
- / ATM gauge
UHV-25-AKC-ENVN / ISO valve
- / HOT ION/ Pirani gague
- / Capaticitiance Pirani gauge
8186227G005 / Angle vacuum valve
- / Pedestal intergration box
0010-29390 / Heater lift motor
- / Shutter motor
MQMA012A4F / Wafer lift motor
- / Side magnet
- / Shutter sensor assy
OBIS-8F / Cryo pump
3870-03478 / Gate valve
- / Heater
- / Driver
- / Heater driver
MQDB012AAD / Wafer lift driver
- / Pedestal driver
FBLD120CW-K4 / Magnet rotation driver
- / MFC
- / Matcher
- / ISAC controller
- / Defective power supply
- / 5-Phase driver
- / ISAC CP 10 Block board
Missing parts:
0190-26328 / Ion guage
1350-00255 / Baratron gague
W117V-3H-F12M-X30014 / ATM gauge
- / Wafer lift pin drive cover
0190-10801 / Shutter sensor
PK564AW2-A8 / Shutter motor
0190-14140 / ESC power supply
0010-21740 / TC amplifier board
- / Backside gas line
- / Capacitor assembly plastic cover
- / Pedestal Intergration box front cover
- / PIB Interlcok PCBA board
1001181-0002-1 / Heater bakeout driver
- / Pedestal lift driver
0190-10801 / Pedestal lift motor
- / MFC 2EA
3870-00899 / Upstream (MFC front valve)
1140-00480 / DC24V Power supply
- / Bake lamp feed thru cover
- / Source Water return line meter
- / Source Water return line
- / Source Water return line check valve
- / Source Water line connecter
- / Heater
- / Heater lift
Power: 208 V
2008 vintage.
아직 리뷰가 없습니다