판매용 중고 AMAT / APPLIED MATERIALS Chamber for Endura II #9385488
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ID: 9385488
웨이퍼 크기: 12"
빈티지: 2008
12"
Part number / Description
0040-82892-001/0040-64040 / Source assembly
0040-81104 / Adaptor
0020-45649 / Camber body
3310-00073 / Manometer
UHV-25-AKC-ENVN / ISO Valve
8186227G005 / Angle vacuum valve
0010-29390 / Heater lift motor
OBIS-8F / Cryo pump
3870-03478 / Gate valve
MQDB012AAD / Wafer lift driver
FBLD120CW-K4 / Magnet rotation driver
Msiing parts:
0190-26328 Ion guage
1350-00255 Baratron gague
W117V-3H-F12M-X30014 ATM Gauge
Wafer Lift Pin drive cover
0190-10801 Shutter sensor
PK564AW2-A8 Shutter motor
0190-14140 ESC Power supply
0010-21740 TC Amplifier board
Backside gas line
Capacitor assembly plastic cover
Pedestal intergration box front cover
PIB Interlcok PCBA board
1001181-0002-1 Heater bakeout driver
Pedestal lift driver
0190-10801 Pedestal lift motor
(2) MFC
3870-00899 MFC front valve
1140-00480 DC 24 V Power supply
Bake lamp feed thru cover
Source water return line meter
Source water return line
Source water return line check valve
Source water line connecter
Heater
Heater lift
Power supply: 208 V
2008 vintage.
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