판매용 중고 AMAT / APPLIED MATERIALS 0010-27983 #9395039

MCA E-Chuck, 12" Leaks: Bellows: 1 x 10E^-9 cc/s Helium line: 1 x 10E^-9 cc/s SUS Cover: 1 x 10E^-9 cc/s Ceramic plate thickness: 11±5 mm Dimple height: 4±1 Micron Pad dimple height: 4±1 Micron Depth of groove: 120±15 Micron Luminosity: 70~180 Flatness of WF zone: 0.02~0.08 µm TC1: 6.0~20.0 Ω TC2: 6.0~20.0 Ω.