판매용 중고 AMAT / APPLIED MATERIALS 0010-11681 #9213297

Ceramic heaters for Producer, 12" Cer plate: P/N: 0040-07033 Uniformity / Temperature test: Check point: 480 Degree C (TC) Maximum: 551.7, minimum: 548.3 Heating rate: 10℃/min TC Wafer: 17 Points Uniformity (Below 3%): 3.4 % Heater surface: High of dimples: 30±10 μm, 32 μm Flatness: 0.02~0.08 μm, 0.06 μm Plate thickness (16.50 mm): 15.70~16.50 mm, 16.50 mm Rods: Resistivity of electrodes: 2.5~3.5 Ω, 2.8 Ω Chucking terminal (after polishing): 2.5-3.52 Ω, 2.9 Ω RF Electrode (ground) Al Cap: Leak test 1 X 10E-9 cc/s, He, 10E-9 cc/s O-Rings Chucking test: ±300 V / Bi -Polar type.