판매용 중고 DISCO DFD 6350 #9218722

Dicing saw SYNCHRD NCPA0055 Spindle About each axis check: Contents Allowance Measure Camera XY perpendicularity 3 µm / 100 mm or less Maximum 3 µm Wave X-axis - Clear Straight Y axis 3 µm / 310 mm or less Maximum 2 µm Y Axis squareness 5 µm / 310 mm or less Maximum 4 µm Y Axis deviation index 2 µm / 155 mm or less Maximum 2 µm Set up repeatability 5 µm / Below 10 Maximum 3 µm Z Axis repeatability 1 µm / Below 10 Maximum 1 µm Spindle shake 3 µm Below Maximum 2 µm Flange cross section Less than 2 µm Maximum 2 µm Spindle rotation Rotational speed within ± 3% 100 RPM X Axis flatness (Base) 4 µm and under Max 4 µm X-Axis flatness (Table) 8 µm / 300mm and underMax 8 µm Check each part functions: Item Standard Measure EM Operating status Stop power off Clear Sensor shaft operating state Axis stop alarm Clear Monitor status No screen cracks Clear Table vacuum pressure Over - 60kpa 72 Flow meter operation V Position Clear Spindle cooling unit 1 ℓ / min or more Clear Carbon brush status 30 Ω or less 17.5 Item Standard Measure PS5-1 DC 5 V ± 5% Clear PS12-1 DC 12 V ± 5% Clear PS12-2 DC 12 V ± 5% Clear PS24-1 DC 24 V ± 5% Clear PS24-2 DC 24 V ± 5% Clear Item Standard Measure CPU BAT1 DC 3.6V 3.56 VGA Screen status Clear EM / SETUP BAT1 DC 3.6V 3.45 COMM I / F Operating condition Clear 2002 vintage.