판매용 중고 LEO / ZEISS 1450VP #293755515

Scanning Electron Microscope (SEM) E-Beam lithography Resolution: 3.5 μm Magnification: 15x- 300,000x Electrostatic beam blanker Stage max movements X,Y,Z and R,T: 100, 125, 35 and 360, 90 Electron gun: LaB6 Turbo / Ion pump SE Detector Pattern generator: ELPHY quantum Probe current: 10-12, 10-7 A Acceleration voltage: 200 V, 30 kV.