판매용 중고 HITACHI S-9220 #9200635

CD Scanning electron microscope, 8" System information: Work station Model: B180L O/S: HP Unix General specifications: SEMI/JEIDA standard orientation Flat or V notch wafers Measurement method: Cursor / Line profile Measurement range: 0.1µm ~ 2.0 µm Measurement repeatability: ±1% / 3 nm (3 sigma) whichever larger Throughput: 56 Wafers/hr Measured points: 1 Point/chip, 5 Chips/wafer Secondary electron image resolution: 3nm Image magnification: 500 ~ 300kx Electron optics system: Electron gun: Schottky emission Accelerating voltage: 500 ~ 1,600 V Lens system: Scintillator/photomultiplier detection system ExB Filter SE / BSE Electrons Objective lens aperture: Heating type movable aperture Fine adjustment possible Scanning coil: 2 stage electromagnetic deflection Stigmator coil: 8-pole electromagnetic type (X, Y axes) Probe current monitoring: Faraday cup incorporated, with automatic measurement Optical microscope: 1.2-mm-square visual field, monochrome image Stage: Movement range: X, Y: 0 ~ 200mm Driving method: Pulse motor Control/speed: Positioning contro Linear encoder Maximum speed: 100mm/s Loader: Wafer transfer: Cassette to loader chamber: Auto transfer via wafer transfer robot Loader chamber to stage: Auto evacuation and auto loading Wafer transfer robot system: Random access using two cassettes Wafer detection in cassette: Automatic detection via wafer searcher Chucking method: Vacuum chucking on back of wafer Orientation flat / V notch detection: Non-contact auto detection via optical sensor Control and display system: CRT: EWS 21 Type monitor display of SEM and OM images GUI Operation screen Wafer map Measured values Stage coordinates Scanning modes: TV Scan HR Scan Slow scan With auto brightness/contrast function Image Processing: Hardware processing using DSP (Option) Recording: Video printer output function (Option) Image filing function (Option) Safety device: Equipped with emergency off swith CD Measurement data processing system: File storage: Storage function for various setting parameters, measurement results Storage media: Hard disk (9.1GB) incorporated in EWS 3.5 Type magneto-optic disk 3.5" Floppy disk Data process function: Statistics output Worksheet system Output of measured values in real time graph Printout: 80 Character thermal printer Evacuation system: Full automatic Dry / Clean evacuation Vacuum pumps : (3) Ion pumps (2) Turbo molecular pumps (2) Oil rotary pumps Safety devices: Protective device against: Power failure Column vacuum level drop Dry air pressure drop Cooling water flow rate drop Grounding: 1000 or less (Single) Nitrogen: 200 ~ 680kPa Pipe outer diameter: 6mm Vacuum: P: 1.3 ~ 21.3 kPa or less Pipe outer diameter: 6mm Circulation cooling water: 98.1 ~ 196kPa Pipe outer diameter: 15mm Environmental conditions: Magnetic field: AC magnetic field: 0.3µT or less DC magnetic field: 0.1µT or less Vibration: Horizontal direction: 1Hz: 3µm (P-P) Max 2Hz: 0.7µm (P-P) Max 3Hz: 1.2µm (P-P) Max 4Hz: 2µm (P-P) Max 5Hz: 3µm (P-P) Max 10Hz: 3.5µm (P-P) Max Noise: Less than 75 dB Room temperature: 20 ~ 25°C (Δt = ±2°C) Humidity: 60% or less Utility: Power: 100 V, 200 V, 208 V, 230 VAC 6 kVA 50/60 Hz 1 Phase 2001 vintage.