판매용 중고 HITACHI S-8840 #9214004

Critical Dimension Scanning Electron Microscope (CD-SEM), 6"-8" Workstation: Model: B180L Operating system: HP Unix SEMI / JEIDA: Flat / V Notch wafers Measurement method: Curser / Line profile Measurement range: 0.1 ~ 11 µ m Measurement repeatability: ±1% / 2 nm (3s) Throughput: 26 Wafers / Hour Secondary electron image resolution: 5 nm Image magnification: 1,000x ~ 150,000x Measurement points: 1 Point / Chip (5) Chips / Wafer Electron optics system: Electron gun: Schottky emission type Accelerating voltage: 500 to 1300 V Lens system: Electromagnetic condenser lens system and FCM objective lens Secondary electron detection method: 2-Stage electromagnetic deflection Objective lens aperture: Heating type movable aperture with fine adjustment Scanning method: 2-Stage electromagnetic method Astigmatism correction method: 8 Polar electromagnetic method (X and Y axis) Monitor: Faraday cup incorporated with automatic measurement function Optical microscope: 1.2 mm² Visual field, monochrome image Stage: Movement range: X and Y: 0 ~ 200 mm Driving method: Pulse motor Computer controlled operation Speed: Maximum 51 mm/s Wafer transfer robot method: (2) Cassettes random access method Wafer detection inside cassette: Arm type robot Vacuum chucking method Orientation flat / V Notch detection: Non-contact automatic detection method Control and display system: Observation control CRT: EWS (GUI) LCD Monitor Integral processing image display Interactive computer operation Wafer map display Measured value indication Stage coordinate indication Scan mode: TV Scan Raster rotation Auto brightness / Contrast control Image processing: Photographic recording unit Effective visual field 80 x 80 mm Safety device: Mushroom type EMO switch Measurement data processing system: File storing function: 3.5" Floppy disk drive 3.5" Magneto optic disk drive With storage Recording media: Hard disk with EWS 3.5" Magnetic optical disk 3.5" Floppy disk Print output: 80 Digit thermal printer Evacuation system: Method: Automatic dry cleaning evacuation system Vacuum pumps: (3) Ion pumps (2) Turbo molecular pumps (2) Oil rotary pumps Safety devices: Power fail / Vacuum level safety devices 1997 vintage.