판매용 중고 HITACHI S-8820 #9172598

CD Scanning electron microscope (SEM), 8" Mainframe Open cassette Electron gun: Schottky emission source CD Measuring size: 200-250 nm, consistently Accelerating voltage: 700 V-1300 V, 10 V Steps Probe current: 1-16 pA With automated setting and measured by faraday cup 1-8 pA at 800V or 1-16 pA (With optional retarding voltage) 1-10 pA at 1000 V 1-13 pA at 1300 V (3) Stage electromagnetic lens system Objective lens: (4) Opening click stop Heated aperture Adjustable outside the vacuum system (2) Stage deflection scan coils Astigmatism correction via an 8-pole electromagnetic coil Magnification: 1000x - 150000x Field control method: Continuously on for sample decharging at all volts Wafer imaging ability: 8” Entire surface Depth of focus: Magnification ≥ 1.0 mm at 80000x Resolution: < 8 nm at 700 V-1000 V or < 6 nm (With optional retarding voltage) < 6 nm at 1000 V-1300 V HITACHI Probe tip Optical microscope system: Monochrome image CCD Camera Magnification: 110x Wafer imaging X and Y coverage from 5 – 195 mm Notch down Workstation HP 715 / 64 User interface software version: 9.25A Error tracking software SECS Communication and GEM interface Multipoint measurement function Edge roughness function Contact hole measurement function Automated image archiving function Cassette flipper: (2) Flippers per load port (3) Ion pumps AV-1 Movable aperture plate assembly Stage and evac panels Stage: X & Y Step motors and drive are intact Vacuum systems: TMP1 TMP2 Valves are intact Wafer loading robot type: MECS OF250 Robot controller: MECS UTC 100A With NAKAV2 (OFV1.7) Pre-aligner type: MECS UTC820Z Pre-aligner controller type: MECS OF250 With OF2BCV1.7 (UTCV2.3) MITUTOYO PSU Model PSU11-2 Loadlock turbopump controller: LEYBOLD NT10 Chamber turobpump type: LEYBOLD Turbovac 340 Chamber turbopump controller type: LEYBOLD NT340M Microscope illuminator type: HOYA-SCHOTT Cold-light HL50E-HI / 50w 12V 5A HITACHI SE Cathode SONY CCD Video camera module MATSUSADA Precision laser PSU type HVL-10P-HS Missing parts: Stage ROM PCB (Wafer transfer unit stage controller) Ion pumps batteries unit: Internal parts Operator interface parts included: Software disks: PANASONIC Magneto-optical disk 128 MB S-8640/8840 CD Measurement SEM system CD Measurement SEM user data Backup SW version 15-10 Number of hours on gun PSU: 51191.7 Workstation type: HEWLETT-PACKARD PA-RISC Powered 715/64 VME Rack boards: EBS 100 Stage controller PCB EPS 100 WT Controller PCB EPS 100 EVAC Controller PCB EPS 100 HV Controller PCB ECPU 261 PCB COGNEX Vision system: 4400 PCB IMEM PCB SIP PCB PSDISP PCB SG / VA PCB EOCONT PCB OMAFC PCB Power supply boards: NAGANO japan radio Co. NUPS-500 HRM NJD-4018 NAGANO japan radio Co. NUPS-500H HRM NJD-275 Ion pump power supply interface PCB Auto transformer unit Currently de-installed and warehoused 1996 vintage.