판매용 중고 HITACHI S-520 #293763048

Scanning Electron Microscope (SEM) KEVEX EDX System Turbo molecular pump Backing pump Power supply transformer Resolution: 60 nm Magnification: 20x to 200000x Signal detection mode Scanning mode Signal processing mode Electrical image shift: ±20 µm CRT Display unit Electron optics: Auto bias system Accelerating voltage: 1 to 30 kV Beam current: 150 µA 3-Stage reduction system Specimen stage: X and Y-Axis: 0-40 mm Z-Axis: 5-35 mm Tilt: -20° to +90° Rotation: 360° Evacuating system: Solenoid valve control system Pirani vacuum gauge Ultimate vacuum: 5 x 10-6 Torr Vacuum pump: DR 400 l/sec x 1 RP 160 l/sec x 1 Water facilities: Flow rate: 2-4 l/min Pressure: 0.5-2 kg/cm² Temperature: 10-25°C Ambient: Temperature: 15° - 30°C Humidity: <70% Manuals included.