판매용 중고 HITACHI S-4500 #9008633

SEM Cold Field Emission System Performance: Secondary electron image resolution: 1.5 nm at 15kv Magnification: 20x - 500kx Electron optics: Electron gun: cold field emmission source Lens type: electromagnetic Objective aperture: 4 position externally selectable Stigmator: octopole electromagnetic Scanning coil: 2-stage electromagnetic Sample chamber Size: type i Airlock: prepumped, max sample size:50 mm diameter Stage motion: 5 axis manual x/y: 25 mm, z: 3-28 mm, t: -5deg - +45 deg., r: 360 deg continuous Draw-out door: max sample size:150 mm dia. Size: type ii Airlock: prepumped, max sample size:100 mm or 150 mm diameter Stage motion: 5 axis manual X/y: 100mm/50 mm, z: 3-33 mm, t: -5 deg - +60 deg., r: 360 deg continuous Display system: Image display: dual 12" monitors Scanning mode: normal, reduced area , line scan, photo scan, spot position, split screen Scanning speed: tv, 0.3, 2, 9, 25, 35, 100, 160 320 s/frame vsignal processing:real-time processing, auto-brightness and contrast control, dynamic stigmator, sutofocus, a vframe averaging, frame integration, contrast conversion, Vacuum system: Full automatic operation with pneumatic valve control Ultimate vacuum: 10 (-7) pa in electron gun chamber, 10(-4) pa in specimen chamber Ion pump: 60 l/s x1, 20 l/s x2 Speciment chamber: dp (570 l/s); turbo optional Foreline: rotary pump x2 Accessories (optional) Edx:at 30 deg. Take off angle Digital image capturing: orion-6 software, optional Chilled water circulator: 10 - 20 deg c, 1.0 -1.5 l/m for dp only Installation Ac: single phase ac 220 or 240 volt, 50/60 hz Grounding: independent grounding 100 ohms or less.