판매용 중고 HITACHI S-4500 #130136

FE SEM, 2” Performance: Secondary electron image resolution: 1.5 nm at 15kv Magnification: 20X - 500KX Electron Optics: Electron gun: Cold field emmission source Lens type: electromagnetic Objective aperture: 4 position externally selectable Stigmator: Octopole electromagnetic Scanning coil: 2-stage electromagnetic Sample Chamber Airlock: prepumped, max sample size:100 mm or 150 mm diameter Stage motion: 5 axis manual X/Y: 100mm/50 mm, Z: 3-33 mm, T: -5 Deg - +60 Deg., R: 360 deg continuous Display system: Image display: Dual 12" monitors Scanning mode: Normal, reduced area , line scan, photo scan, spot position, split screen Scanning speed: TV, 0.3, 2, 9, 25, 35, 100, 160 320 s/frame Signal processing:Real-time processing, auto-brightness and contrast control, dynamic stigmator, autofocus, a Frame averaging, frame integration, contrast conversion, Vacuum system: Full automatic operation with pneumatic valve control Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber Ion pump: 60 L/s X1, 20 L/s X2 Specimen chamber: DP (570 L/s); Turbo Optional Foreline: Rotary pump X2 Accessories (Optional) EDX:at 30 Deg. take off angle Digital Image capturing: Orion-6 software, Optional Chilled water circulator: 10 - 20 deg C, 1.0 -1.5 L/m for DP only Installation AC: Single phase AC 220 or 240 volt, 50/60 Hz Grounding: Independent grounding 100 Ohms or less 1994 vintage.