판매용 중고 HITACHI HS-9050 #293750873
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ID: 293750873
System
(3) Load ports
(3) Ash/Strip process chambers
Chambers: PM1, PM2, (8) Sticks gas panels
Chamber: PM3, (10) Sticks gas panels
SINFONIA Robots and loaders
SHIMADZU Turbos
EDWARDS Dry pump
Dual zone temperature ESC
Buffer and transfer module
Dual wafer substations
Cooling unit
Process kit included.
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