판매용 중고 FEI Nova 200 #293687680
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ID: 293687680
Focused Ion Beam Scanning Electron Microscope (FIB SEM)
Dual beam
Sirion electron column with SCHOTTKY Thermionic emitter (field-assisted): 2-30 keV
Gallium ion source: 5 and 30 keV with Magnum™ ion column with octupole electrostatic lens
Everhart Thornley detector for secondary electron and backscattered electron
Kleindiek 3-axis micro-manipulator
Pt deposition: Gas Injection System (GIS) for masking, contacting and hole-filling
XeF2 Enhanced etching (7x increase)
5-Axis ucentric stage
X,Y: ±50 mm
Z: 25 mm
Tilt: -15° to + 75°
Rotation = 360°
Ion probe range: 1pA to (7 nm diameter) to 20 nA (430 nm).
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