판매용 중고 WATKINS-JOHNSON 1000H #199252

Reactor / Hydride system, 8" 3.0 system with exhaust modified to 2.0 inch for better uniformity Silane (SiH4) based SiO2 Tool was devoted to SiO2 only; Never ran dopants Voltage: 208, 50/60hz, 3 phase (2) Sets of parallel plate injectors Planned processes: Film type: NSG, Chamber 1: 380°C deposition temp., 250A thickness, 8", 11ipm belt speed Film type: NSG, Chamber 4: 380°C deposition temp., 2000A thickness, 8", 11ipm belt speed Film type: NSG, Chamber 4: 380°C deposition temp., 1000A thickness, 8", 11ipm belt speed Gas box: (4) D1N2, 10slm, Lintech MC-200B, 100% concentration (4) O2, 1.5slm, Lintech MC-2100O, 100% concentration (4) Sep N2, 20slm, Lintech MC-200B, 100% concentration (4) B2H6 (4) PH3 (4) SiH4, 0.2slm, Lintech MC-2100MO, 20% concentration, N2 balance gas (4) D2N2, 6slm, Lintech MC-200B, 100% concentration Cable lengths: UPS Communication Cable (Note 1) 40ft, Part No: 815003-378  Communication Cable (Note 2) 20ft, Part No: 815001-732  Reactor Facility Cable 40ft, Part No: 907233-004 UPS Power Cable 10 40ft, Part No: 985227-004 UPS Extension Cable 30ft, Part No: 907202-003 Exhaust modifications done at time of original build: 3.0 to 2.0 Exhaust Downgrade Kit: A) (8) Adaptor Assy, 3.0 to 2.0 Orifice B) Toroidal 3.0 to 2.0 orifice installation kit (replaces 912010-001) C) Process output plumbing kit (replaces 912106-001) D) Hoist Adaptor Kit E) 2.0 Muffle Etch Hardware: 3 color signal tower: Green-Yellow-Red SECS II SW option English software Modifications by OEM: 1 - The 3" exhaust was modified at the torrodial orifices to 2" that can provide better on wafer uniformity for the SiO2 film The torrodials, bellows, and injector vents also have 2" exhaust type Downstream of the torrodials to the house exhaust the system is the standard 3" type 2 - Gas box has SiH4, N2, and O2 MFC's, but never had dopant (B2H6 and PH3) MFC's installed for BPSG films This tool has never run dopants There are SS tube spools in place where the dopant MFC's would normally be placed If the buyer wants to run doped films that is no problem, they just need to add the MFC's into the tool The original owner only used the tools for various SiO2 films and wanted to keep them (and the system) as pure and dopant free as possible UPS may not be included/or non-functional due to age Tool is de-installed, barrier bagged, and crated Currently stored in a warehouse 1996 vintage.