판매용 중고 VEECO / EMCORE K465i #9012796

MOCVD system GaN Max temp 1250C degree set point 8 PSU DRT (bow, real temp) (2) Real temp 8 x MO lines NH3, SiH4 (2) MO concentration control (2) Ebara process pump Automated loading chamber Nexus control system H2 + NH3 gas monitor N2+NH3 POU purifiers (2) Johson Matthey V-480 H2 Pd cell purifiers (2) hygrometers (6) water cooled MO baths Fully automated metal-organic chemical vapor deposition (MOCVD) system designed for the production of high-brightness light-emitting diodes Can accommodate up to (45) 2" substrates (or 1x8") in one process Uses FlowFlange technology designed to create a uniform alkyl and hydride flow across all wafers Temperature uniformity by (3) separate heating zones controlled by RealTemp200 systems and additional pyrometer Wafer curvature is monitored by dedicated deflectometer Fully robotized carrier handling tool allows for continuous operation All manuals and schematics for reactor from original Veeco purchase (3) brand-new wafer carriers/susceptors K465i growth chamber and Uniform Flow Flange assembly Rotary Robot Arm Transfer assembly (robot, end effector, robot chamber, buffer chamber, gate valves, controller, etc.) Laminar flowhood wafer loading platform Complete gas panel (NH3/N2/H2, MO source lines, SiH4 source line), injector block Ferrofludic turbodisc rotation assembly Turbodisc controller (2 sets) Veeco K465 heater assembly and filaments (1 installed in chamber, 1 full set as a spare) (2) Ebara ESA-25D process pumps Load lock pump (2) high-capacity particle filter assemblies. (2) particle filter elements Reactor pressure throttle valve (8) DC power supplies for filaments Eurotherm controllers Reactor control CPU, Servo CPU, (2) PC monitors, keyboard and mouse (2) RealTemp 200 Modeling System with dedicated CPU (1) DRT-210 Real-Time Monitoring System with spare CPU (4) Lauda Model 215 bubbler baths (2) Lauda Model 235 bubbler baths (2) Lytron Heat Exchangers for reactor Growth chamber baratron gauge (2) – Piezocons Flow Flange Lift Cart H2 Pd purifier cabinet model: HP 200/400 V-Purge NH3 Purifier - Aeronex 10M N2 Purifier - Aeronex 10M Hygrometer Assy 2-channel Panametrics CM4 Gas monitor Spare Baratron (pressure manometer) and MFC (3) spare Eurotherm controllers (2 cases, 1 partial) MassVac filter elements 2010 vintage.