익숙한 VEECO / EMCORE E450 #9363532 판매용
ID#: 9363532
System
Wafer capacity: Up to 48"
Group III MO sources:
(2) TMGa
(2) TMIn
(2) TMAl
Group V hydride sources:
(2) AsH3
PH3
Dopants MO:
CP2Mg
CBr4
Dopants hydride: H2/SiH4
(2) NESLAB Baths
(7) Lorex piezocons
2-Channels for TMI expendable to 4 (For 2 additional TMG)
EBARA A70W Pump
Exhaust system:
(2) Particle filters
Housing
Phosphorus trap
P-Trap automatic regeneration system loadlock: Loadlock chamber
Glove box
Moisture monitor
Wafer carrier transfer robotic system heater
(3) Heater elements:
Inner
Middle
Outer graphite heater temperature control
Temperature monitor 3-point T/C
YOKOGAWA Controller
3-Point SEKIDENKO pyrometer
Gas monitoring:
Gas leak monitor
Toxic gas
H2 Gas monitor system
Epi Windows 2000.
제조사:
VEECO / EMCORE모델:
E450범주:
REACTORS장비 세부 정보:
Wafer capacity: Up to 48"
Group III MO sources:
(2) TMGa
(2) TMIn
(2) TMAl
Group V hydride sources:
(2) AsH3
PH3
Dopants MO:
CP2Mg
CBr4
Dopants hydride: H2/SiH4
(2) NESLAB Baths
(7) Lorex piezocons
2-Channels for TMI expendable to 4 (For 2 additional TMG)
EBARA A70W Pump
Exhaust system:
(2) Particle filters
Housing
Phosphorus trap
P-Trap automatic regeneration system loadlock: Loadlock chamber
Glove box
Moisture monitor
Wafer carrier transfer robotic system heater
(3) Heater elements:
Inner
Middle
Outer graphite heater temperature control
Temperature monitor 3-point T/C
YOKOGAWA Controller
3-Point SEKIDENKO pyrometer
Gas monitoring:
Gas leak monitor
Toxic gas
H2 Gas monitor system
Epi Windows 2000.
