판매용 중고 VEECO / EMCORE D125 #9212026

MOCVD System (2) Chillers Semi-automatic wafer transfer Gas delivery system Flanges constructed of 316L stainless steel Reactor & gas panel: With exhaust vented steel & polycarbonate cabinet panels HEPA Filtered wafer loading area With system cabinet 7-8 Metal organic channels (Switchable from N2 to H2 carrier gas) 3-4 Hydride channels Standard non-emissivity corrected pyrometer included Up to 3 2"/1 3" wafers per run capability (4) SiC Coated wafer carriers: (2) Standard 3 x 2" / (2) Custom configurations EBARA A70W Process pump MKS Butterfly reactor exhaust line pressure control valve With PID control Turbo molecular pump / Scroll dry pump for load lock CTC Controller with low noise analog card for T/C channel MO & Hydride delivery SS lines Heaters and controls (5) MO Bath water chillers AFFINITY / LYTRON / Equivalent heat exchanger Turbo rotation: 1500 RPM Safety alarm system Control system: Operating system: Windows 7 Personal computer (PC) With flat panel monitor Alarms Routines provide unparalleled control system versatility Spare parts: (3) Analog cards (2) Digital cards (2) MFC PCU Baratron ATMI CDO 862 Abatement system Combination scrubber and burn-box Nitride MOCVD precursors: NH3, H2, SiH4, MOs Handling maximum D125/D180 gas flows (according to OEM specifications) Scrubber water: Recirculated in loop PRAXAIR (3) Bottles ULTRA PURGE ammonia gas cabinet Internal gas network: ULTRA PURGE Controller (2) 501b ammonia bottles Does not include nitrogen purge bottle Air products AP10, 24" silane gas cabinet Touch screen controls (2) SILANE Bottles Indoor gas distribution panel for hydrogen and nitrogen: Anodized aluminum: 3 ft. x 4 ft./ Smaller gas panel Cylinder banks and nitrogen purge: Manifold with (2) hydrogen inlets (2) Pressure regulators (3) Check valves (2) Inline particle filters (8) Manual valves High purify 1/4 inch tubing Tees Weldments (Orbital welding) (2) Pressure gauges Leak checking and certification of leak integrity Outdoor gas distribution panel for hydrogen with nitrogen purging capability: 36 in x 9 in / Smaller anodized aluminum gas panel Purging & switching manifolds for (2) six pack cylinders Manual valves and (2) check valves UHP 1/4 inch Tubing Weldments (Orbital welding) (2) Pressure gauges Leak checking & certification of leak integrity System electrical specification: 208 / 220V 50 or 60 Hz 3 φ 150 A per φ 5 Wire with GND Gas supply specification Type / Rating / Max flow / Mean flow Purified H2 / 30-40-100 PSIG / 65 SLM / 30-40 SLM Purified N2 / 80-100 PSIG / 70 SLM / 20-40 SLM N2 House feed / 80-100 PSIG / 50 SLM / 25 SLM CDA/N2 for pneumatics / 80-100 PSIG / 50 SLM / < 15 SLM NHa / 40-60 PSIG / 30 SLM / - 100 ppm SiH« in UHP H2 / 20-30 PSIG / 22 SLM / - 2003 vintage.