판매용 중고 THOMAS SWAN / AIXTRON CCS #293827393

ID: 293827393
빈티지: 2005
MOCVD System Reactor capacity: 19x2" Substrates Temperature: 1300 °C Heating system: 3-zone tungsten heater with SiC-coated graphite susceptor Process control: 5 optical windows ED500/2 Clean system Gas purification Dual-scrubber system Pumping capacity: 300 m³/h. 2005 vintage.
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