판매용 중고 NOVELLUS Sequel Express #9313087

System P166/64M Controller Signal tower: Front mount type LCD Monitor, 12.1" DLCM: Module P166/64M Module controller Cassette transfer: Shuttle type BROOKS AUTOMATION Magnatran 7 TM Robot, P/N: 003-1600-25 Indexer robot: Motor CDP2407-2 Animatics 26 Slots arc bar Auto cassette mapping MKS 750B11TCE2GK Manometer, 10 Torr GRANVILLE PHILLIPS 275 Mini convectron TYLAN ACX 3200 Throttle valve controller Slit valve type: L/L VAT/CH (3) 27-10157-00 IO Controllers CVD 1: Module ADVANCED ENERGY 3150274-004 B SE RF Match network View port left / Right RF Distribution Gas distribution No heat mix bowl (6) Shower heads Process chamber ring MESC Flange MKS 627A13TBC Manometer, 1000 torr MKS 627A11TBC Manometer, 10 torr UE PV48W-14 Vacuum switch, atmosphere UE E48W-H14 Vacuum switch, 15 torr VM3200 End point detector, integrated dual wavelength EPD (3) Digital dynamic 27-10157-00 IO controllers Throttle valve controller 02-123072-00 Rev A interlock PCB, CVD P166/64M Module controller Water flow switch Gate valve, Hi Vac, 4" Throttle valve Spindle mechanism: Ferrofluidic - Bellows type Process chamber: Vertical 4-line type Exhaust type: Vertical process chamber EUROTHERM Temperature controller Hastings gauge ADVANCED ENERGY PDX 1400 MF GEN RF Generator, P/N: 27-115617-00 F/R A ADVANCED ENERGY RFG 5500 Generator rack, P/N: 27-028379-00 F/R C MFC (AERA): FC-7800CD, 1SLM, SiH4 FC-7800CD, 5SLM, N2 FC-7800CD, 10SLM, He FC-7800CD, 10SLM, NH3 FC-7800CD, 20SLM, O2 FC-7800CD, 5SLM, O2F6 FC-7800CD, 20SLM, N2O FC-7800CD, 10SLM, N2 CVD2: ADVANCED ENERGY 3150274-004 B SE RF Match network: View port left / Right RF Distribution Gas Distribution Mix bowl: Temperature setting type (6) Shower heads Heater block Process chamber ring MESC Flange MKS 627A13TBC Manometer, 1000 torr MKS 627A11TBC Manometer, 10 torr UE PV48W-14 Switch, vacuum, atmosphere UE E48W-H14 Switch, vacuum, 15 torr VM3200 End point detector integrated dual wavelength EPD (3) IOC 27-10157-00 / Ver4.1 Controller, throttle valve Interlock PCB, CVD Rev A 02-123072-00 P166 / 64M Module controller Water flow switch Gate valve, Hi Vac, 4" Throttle valve Spindle mechanism: Ferrofluidic - Bellows type Process chamber: Vertical 4-line type Exhaust type: Vertical process chamber EUROTHERM Temperature controller Hastings gauge ADVANCED ENERGY PDX 1400 MF GEN RF Generator, P/N: 27-115617-00 F/R A ADVANCED ENERGY RFG 5500 Generator rack, P/N: 27-028379-00 F/R C MFC (AERA): FC-7800CD, 1SLM, SiH4  FC-7800CD, 5SLM, N2 FC-7800CD, 10SLM, He FC-7800CD, 10SLM, NH3 FC-7800CD, 20SLM, O2 FC-7800CD, 5SLM, C2F6 FC-7800CD, 20SLM, N2O FC-7800CD, 10SLM, N2 SSD: MSSD 01-132945-00, MSSD included UPS AC 208V, 3-Phase, 5-Wires, 50 Hz, 1000 kVA AC 208V (CVCF) Single phase, UPS 50 Hz, 20 Amps.