판매용 중고 NOVELLUS CONCEPT 2 Speed #9140633

Systems, 8" (3) Chambers Wafer shape: flat PET Module Module A: Shrink Process A: STI / IMD Module C: Shrink Process C: STI / IMD System UPS power Module B: Shrink Process B: STI / IMD Loadlock dry pump: LOT 105 Slit valve insert Slit valve type: SMC L-Motion TM dry pump model: LOT 105 Loadlock baratron: MKS TM Turbo pump: PFEIFFER TMH260 TM Throttle valve: MKS TM Baratron model: MKS Wafer sensor Fab installation EMO's (Turn to release) Front monitor: Stand alone UI rack Signal tower Module controller: MC1 Host interface: SECS Module A: Chamber type: Shrink Chamber process: STI / IMD Process clean type: In-situ Module controller: MC1 Module turbo pump: MAG2000 Manometer 1(10T): MKS7 750B Throttle valve: MKS 153D-15973 ESC / Dome cooling: PCW Temperature monitoring: NTM500C Manometer 2(10T): MKS 750B HF Generator: AE RFG5500 LF Generator: AE PDX 8000 RF Match: Mercury 3013 Manometer 3(100m): MKS 629B Dual clean injector kit Injector type: Single Louvered screen Pedestal lift type: Dual position Foreline type: Universal Injector size: 2" Module B: Chamber type: Shrink Chamber process: STI / IMD Process clean type: In-situ Module controller: MC1 Module turbo pump: MAG2000 Manometer 1(10T): MKS7 750B Throttle valve: MKS 153D-15973 ESC / Dome cooling: PCW Temperature monitoring: NTM500C Manometer 2(10T): MKS 750B HF Generator: AE RFG5500 LF Generator: AE PDX 8000 RF Match: Mercury 3013 Manometer 3(100m): MKS 629B Dual clean injector kit Injector type: Single Louvered screen Pedestal lift type: Dual position Foreline type: Universal Injector size: 2" Module C: Chamber type: Shrink Chamber process: STI / IMD Process clean type: In-situ Module controller: MC1 Module turbo pump: MAG2000 Manometer 1(10T): MKS7 750B Throttle valve: MKS 153D-15973 ESC / Dome cooling: PCW Temperature monitoring: NTM500C Manometer 2(10T): MKS 750B HF Generator: AE RFG5500 LF Generator: AE PDX 8000 RF Match: Mercury 3013 Manometer 3(100m): MKS 629B Dual clean injector kit Injector type: Single Louvered screen Pedestal lift type: Dual position Foreline type: Universal Injector size: 2" Power supply: 3￠, 5 Wires, 208V 2000 vintage.