판매용 중고 NOVELLUS CONCEPT 2 Speed #9075495

HDP CVD System, 8" Type: Shrink Process: STI / IMD Wafer shape: Notch Module A: shrink Module B: shrink Module B: shrink MKS Load lock baratron TM Robot: Mag 7 Ceramic TM Robot blade MC1 Module controller Existence wafer sensor EMO: Turn to release SECS IOC Version: 4.1 LCD Front monitor, 12" DLCM Gas MFC: UPC1(L L/L) Ar/He 1SLM Brooks 5866 UPC2(R L/L) Ar/He 1SLM Brooks 5866 MFC3 Ar/He 500 Sccm Brooks 5964 Chamber (A, B, C): Chamber Type: Shrink Chamber Process: STI / IMD MC1 Module controller Throttle valve: MKS 651D HF Generator: AE RFG5500 IOC Version: 4.1 Pedestal lift type: Dual position Module turbo pump: Pfeiffer TMH 2101 PCX ESC / Dome cooling: PCW LF Generator: AE PDX 8000 Dual clean injector kit Fore line type: Universal ESC Type: DS1 Manometer 1(10T): MKS629B Manometer 2(10T): MKS629B Manometer 3(100 m): MKS750B Process clean type: In situ RF Match: MECURY 3013 Injector type: Single Injector Size,1" Chamber gas box: MFC 1 Ar 500 STEC MFC 2 O2 500 STEC MFC 3 NF3 1000 STEC MFC 4 SiH4 200 STEC MFC 5 HE 1000 STEC MFC 8 H2 2000 STEC System main power: 3-208 V System UPS Power: 3-120 V Slit valve insert Slit valve type: SMC L-Motion TM Turbo pump model: Pfeiffer TMH 260 TM Throttle valve model: Tylan MKS TM Baratron model 2004 vintage.