판매용 중고 NOVELLUS CONCEPT 2 Sequel Express #293743517
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ID: 293743517
웨이퍼 크기: 8"
빈티지: 2002
CVD System, 8"
Wafer type: Notch / flat
Process: SION
Mag7 Robot vacuum
Single chamber
Light towers: RYG, 3-Color
Main frame: DLCM Express, 8"
Signal tower: Cool station
Dual load lock cassette module
No integrated SMIF ASYST LPI2200
No front-end option
Process chamber A:
Process type: SION
High frequency RF Generator: RFG5500
Low frequency RF Generator: PDX1400
Gate and throttle valve
End point detector
Manometers: 10 / 1000 TORR MKS
Ferrofluidic spindle
Clean process: IN-SITU
Gas box:
Gas / MFC Size (SCCM)
C2F6 / 5000
PH3 / 1000
O2 / 5000
SIH4 / 1000
NH3 / 3000
N2O / 10000
N2 / 10000
N2 / 5000
Heater
Shower head
Gas box exhaust
2002 vintage.
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