판매용 중고 ASM Epsilon E2000 Plus #293748350

EPI Reactor, 8" Left / Right hand Standard pitch Transfer arm wide Silicon source Thermal Enhancement Kit (TEK) Multiport injector with Water-cool Purifier system: N2, H2, HCL Quartz chamber: OP3 Flanges Graphite: Supplier: Covalent Rings: Square Susceptor: Standard Grid self centering Gas / MFC module: Horiba H2/N2: 50 SLM HCL high: 20 SLM HCL low: 1SLM Dopant 1: P-Dopant Dopant 1 Diluent: 20 SLM Dopant 1 Source: 500 SCCM Dopant 1 Deposit: 500 SCCM Dopant 2: N-Dopant Dopant 2 Diluent: 20 SLM Dopant 2 Source: 500 SCCM Dopant 2 Deposit: 500 SCCM SiH4: 1 SLM 10%GeH4/H2: 1 SLM SiH2CI2 (DCS): 300 SCCM MFC Configuration: MFC / Range / Model / Facility N2/H2 / 100SLM / HORIBA / N2/H2 SHAFT PURGE / 10SLM / HORIBA / N2 P-DILUENT / 30SLM / HORIBA / 10%B2H6/H2 P-SOURCE / 1000SCCM / HORIBA / 10%B2H6/H2 P-INJECT / 1000SCCM / HORIBA / 10%B2H6/H2 N-DILUENT / 30SLM / HORIBA / 1%PH3/N2 N-SOURCE / 1000SCCM / HORIBA / 1%PH3/N2 N-INJECT / 1000SCCM / HORIBA / 1%PH3/N2 DCS / 3SLM / HORIBA / DCS(SiH2CI2) HCL / 30SLM / HORIBA / HCL HCL / 1SLM / HORIBA / HCL GeH4 / 1SLM / HORIBA / 10%GeH4/H2 SiH4 / 3SLM / HORIBA / SiH4 Power supply: 50 Hz.