판매용 중고 AMAT / APPLIED MATERIALS Smartweb SL-3L/800 #293745938

Roll to roll coating system (2) Chillers Roughing pump system Process and rewinding module Media supply Electrical cabinet Cooling Heating Trolley Cathode colling Control PC Console table Scrubber Coatings: Materials / Mode Metals: Copper, Gold, Silver, Aluminium, Molybdenum, Titanium / DC Alloys: Ni/Cr 80/20 / DC Dielectrics: ITO, AI:ZnO / DC SiOx, AI2O3, TiO2 /MF ZnO / DC, MF System cooling water: Inlet pressure: 4 to 6 bar Outlet pressure: Pressure-less, Open drain Consumption: Maximum 50 m³/h Average consumption: Approximate 26 m³/h Temperature (Inlet): Minimum 18°C, Maximum 22°C Temperature rise: Maximum 6°C Carbonate hardness: <6 to 8° pH value: 8.5 to 10 particle size: Maximum 100 μm Particle concentration: Maximum 10 parts/cm³ CO2-content: Maximum 15 mg/l CI-content: Maximum 20 mg/l Cathode cooling circuit: Filling quantity: Approximate 1100 Liters Carbonate hardness: <7° pH value: 8.0 to 9 Particle size: <5 µm Solved oxygen: Maximum 5 mg/l Resistivity at + 25°C: >2 x 103 Ohm cm Compressed air: Pressure: 6 to 7 bar Average consumption: Approximate 1 m³/h Particle size: Maximum 5 µm Particle concentration: Maximum 5 mg/m³ Oil-content: Maximum 5 mg/m³ Dew point: 2°C Gases: Argon, Nitrogen, Oxygen, Argon/Oxygen 80/20 Pressure: 1, 2 bar Purity: 99.995 Gas tubing: Stainless steel, Coupling Winding: Web speed: 0.5 to 20.0 m/min + 0.1% of nominal speed at the motor shaft Unwind / Rewind: 60 to 600 N Tension measuring rollers with analog load cell Vacuum: Ultimate pressure: <8 x 10^-7 mbar in sputtering compartments of process modules Pump down time to ultimate pressure: 24 Hours Pressure during sputtering: 1 to 9 x 10^-3 mbar Pump down time to 6 x 10^-6 mbar: <60 minutes Measured at a pressure: < 2x10^-3 mbar Gas separation factor between sputter compartments and sputtering compartments: >100: 1, only for maximum substrate thickness loaded Electrical Services: Voltage: 400 V +10/-10% 50 Hz, 3 Phase, TN-network with loadable PEN for 60 Hz Connected load: 320 kVA Average consumption: Approximate 240 kW Short circuit current: Maximum 50 kA Process coating: Magnetron sputtering coating technology One coated side Substrate width: Maximum 820 mm Coating area web width reduced: 10 mm Coating width: Minimum: 300 mm, Maximum: 600 mm Environment: Temperature: Minimum 15°C, Maximum 35°C Humidity: Maximum 90% at 20°C, Maximum 50% at 35°C Maximum altitude of installation site: 1000 m above sea level 2018 vintage.