판매용 중고 AMAT / APPLIED MATERIALS P5000 #9217907

CVD System, 8" Process: SIO Process chamber: Chamber A & B: SIO Chamber D: ETCH Chamber version: Chamber A & B: VAT ISO Valve Chamber D: Standard RF Generator type: Chamber A & B: OEM-12B Dry pump type: Chamber A, B, D & L/L: EBARA 50x20 UERR 6M-J Throttle valve type: Chamber A, B & D: Non heated VME System: 20 Slots CPU: Synergy Video: VGA SEI AI AO (4) DI/DO (4) Steppers Hard Disk Drive (HDD) Floppy Disk Drive (FDD), 3.5" Manometer type: Chamber A & B: MKS 122B 11441 Chamber D: MKS 127 RF Matching box type: Chamber A & B: 0010-09750D DR Chamber D: 0010-09416 Turbo pump type: Chamber D: LEYBOLD NT340M System electronic type: (2) TC Gauges Buffer I/O AI MUX (2) OPTO (4) Choppers +12VPS +15VPS -15VPS Storage elevator: 8 Slots Cassette handler: Phase III, Top clamp Robot: Phase III Blade: Phase III I/O Wafer sensor Load lock purge Heat exchanger: AMAT0: Connect to chamber A, B & D: Wall / LID Main frame front type: Through-the-wall Standard remote frame TC Gauge type: Chamber-A Rough: VCR Chamber-B Rough: VCR Chamber-D Rough: VCR L/L Rough: VCR L/L Chamber: VCR Lamp module type: Chamber A & B: STD 0010-09337 Mini-con Magnet driver type: Chamber A & B: P/N 0015-09091 Chamber D: P/N: 0015-70060 Signal tower Gas panel type: (28) Gases MFC Type (Main): Chamber / Flow Gas / Flow size / Calibration gas / Maker / Model B / SIH4 / 500 / N2 / STEC / SEC-4400 B / N2 / 5000 / N2 / STEC / SEC-4400 B / CF4 / 5000 / N2 / STEC / SEC-4400 B / N2O / 300 / N2 / STEC / SEC-4400 A / SIH4 / 500 / N2 / STEC / SEC-4400 A / N2 / 5000 / N2 / STEC / SEC-4400 A / CF4 / 5000 / N2 / STEC / SEC-4400 A / N2O / 300 / N2 / STEC / SEC-4400 D / O2/ 100 / N2 / STEC / SEC-4400 D / CF4 / 500 / N2 / STEC / SEC-4400 D / AR / 100 / N2 / STEC / SEC-4400 MFC Type (Remote): Chamber / Flow Gas / Flow size / Calibration gas / Maker / Model A / NF3 / 1000 / N2 / STEC / SEC-4400 A / N2O / 3000 / N2 / STEC / SEC-4400 B / NF3 / 1000 / N2 / STEC / SEC-4400 B / N2O / 3000 / N3 / STEC / SEC-4400 1996 vintage.