판매용 중고 AMAT / APPLIED MATERIALS P5000 MxP #9017018

Cluster tool, 8" (2) Chambers (8) Storage units General Information: Cass nest: Plastic 8" Wafer shape: SNNF (Semi notch no flat) No SMIF Interface System Information: Software version: B4.70 Has SECS / GEM Chamber Location / Type / Current Process: Position A: MxP / Oxide etch Position B: MxP / Oxide etch Etch chamber: Chamber type: MxP Wafer clamp: Polyimide ESC Has BS He Cooling Has He dump line Turbo pump: SEIKO STP-301CVB Endpoint type: Stand alone Monochrometer qty: Each per chamber Generator model: ENI OEM-12B3 Max Power: 1250 w Lid temp control: PID control Gate valve: Heated gate valve Matcher: SMA-1000 Process Manometer: MKS 1 Torr Gas Panel: Manual valve: On each line Filter: On each line Gas panel facilities hook up: Multi-line top feed Exhaust: Top Has gas panel door interlock Has gas panel exhaust interlock Gas Panel Pallet: (5) Insert gas lines per chamber MFC Type: STEC SEC-44000 MC / STEC SEC-Z512MGX Chamber A: Line 1: O2 / 212 / SEC-4400 Line 2: Ar / 150 / SEC-Z512MGX Line 3: N2 / 100 / SEC-4400 Line 4: CF4 / 100 / SEC-4400 Line 5: CHF3 / 100 / SEC-Z512MGX Chamber B: Line 1: O2 / 212 / SEC-4400 Line 2: Ar / 150 / SEC-Z512MGX Line 3: N2 / 100 / SEC-7440M Line 4: CF4 / 100 / SEC-4400 Line 5: CHF3 / 100 / SEC-Z512MGX Mainframe: Loadlock type: 8-slot Has cassette present sensor Robot type: DRIVE, ROBOT P 5000 WKIT EMO Button: Front, side Has water leak detector Signal tower (front): Green, yellow, red Remotes: Line frequency and voltage: 50 / 60 Hz, 3 Ph, 208 VAC Remote UPS interface: 1 Ph, 120 V System monitor display / conntroller: In front Has EMO button Has smoke detector Has water leak detector Heat Exchanger type: For wall: AMAT-0 x1 For cathode: NESLABE HX-150 x1 Pumps Type: LL Chamber: EBARA A10S (not included in scope) Chamber A: EBARA A30W (not included in scope) Chamber B: EBARA A30W (not included in scope) 1992 vintage.