판매용 중고 AMAT / APPLIED MATERIALS Lot of PVD systems #9299990
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ID: 9299990
Qty / Model
(2) / Centura
Multi chamber type sputter system, 8"
L/L Narrow HP
Chamber A: GANMA2 / TTN (ESC)
Chamber B: GANMA2 / TTN (ESC)
Chamber C: PC2
Chamber D: Cool down
Chamber E: Blank
Chamber F: O/D
1996 vintage
PVD System, 6"-8"
Frame: Centura 5200
(2) Process chambers
(2) CTI-CRYOGENICS 9600 Compressors
Generator rack
AC Controller
Cassette stage type: Automated
Load lock chamber
Body type: Narrow
Buffer chamber
HP Robot
Automated indexer
Blade: Metal
SBC Board V452
Chamber A: GAMMA 2 TiN (ESC)
Chamber B: GAMMA 2 TiN (ESC)
Chamber C: PC-II
Chamber D: Cool down
Chamber F: Orientor degas
Chamber A:
Wide body
Magnet: 0010-21788
Heater: E-Chuck
Target: Ti
Shutter
DC P/S (Master): MDX-L12M-650
DC P/S (Slave): MDX-L12-650
Chamber B:
Wide body
Magnet: 0010-21788
Target: Ti
DC P/S (Master): MDX-L12M 0190-76192
DC P/S (Slave): MDX-L12-650 0190-21111
Missing parts:
Electrostatic chuck CH-A, CH-B
Ion gauge sealing cap
Spark power supply
Heater drive motor
Matcher
Power supplies
Lid for cooling
SBC
Heater driver
Ion gauge driver
Power supply: 3 kV and controller
Floppy disk drive
D-I / O Board
A-I / O Board
ISO / AMP Board
Robot indexer cable
CRT
SCE, PVD Driver
2-Phase driver
(2) Generator rack remotes 15V
System PS 24 V Unite
Generator racks
NESLAB
Roughing piping
Power cable
1996 vintage
(2) / Endura / PVD Systems, 8"
L/L Narrow HP
Chamber A: Pass through
Chamber B: Cool down
Chamber C/D: PC2
Chamber F: O/D
Chamber 1: AL (ESC) STD
Chamber 2: TTN 101Ti / TiN WB
Chamber 3: TTN 101Ti/TiN WB
Chamber 4: Ti (ESC) WB
2001 vintage.
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