판매용 중고 AMAT / APPLIED MATERIALS Endura 5500 #9257162

Sputtering system, 6" Load lock chamber: LLC Type: Narrow body Indexer without rotation Wafer mapping CH Vent: Slow / Fast vent No wafer slide out detector Buffer chamber: AGILENT / HP / HEWLETT-PACKARD Robot Upper and lower motors (2) Gate valves Cryo pump: 3 Phase (7) Wafer sensors Transfer chamber: AGILENT / HP / HEWLETT-PACKARD Robot Upper and lower motors (2) Gate valves Cryo pump: 3 Phase (6) Wafer sensors Chamber A: Pass through Chamber B: Cool down Chamber A / B: Lid type: Clear plastic Wafer lift Wafer lift hoop No TC monitor Chamber E / F: Orienter degas Degas lamp module Wafer lift Wafer lift hoop Wafer chuck Orienter controller PCB Laser CCD array PCB No TC No TC amp Chamber 1: PVD Wide body Source assy: 11.3" Source bracket kit COH TI Adapter plate Wafer lift: Clamp Heater: Clamp Heater water box: Clamp MKS 100 mT Manometer Ar Backside (2) Gate valves Ion gauge Shutter option Cryo pump, 3 Phase Heater type: Clamp Chamber harness Chamber inter-connect PCB Chamber process gas line Chamber vent line Chamber source water manifold Chamber pneumatic 1/8 poly line set Chamber 2: PVD Wide body Source assy, 11.3" Source bracket kit Adapter plate: WB to STD 13" Wafer lift: Clamp Heater: Clamp Heater water box: Clamp MKS 100 mT Manometer Ar Backside (2) Gate valves Ion gauge Shutter option Cryo pump: 3 Phase Chamber harness Chamber inter-connect PCB Chamber process gas line Chamber vent line Chamber source water manifold Chamber pneumatic: 1/8 Poly line set Chamber 3 / 4: PVD Wide body Source assy: 11.3" Source bracket kit Adapter plate: WB to STD 13" Wafer lift: Clamp Heater: Clamp Heater water box: Clamp MKS 100 mT Manometer Convectron gauge Ar Backside (3) Gate valves: PVD Ion gauge Shutter option Heater type Chamber harness Chamber inter-connect PCB Chamber process gas line Chamber vent line Chamber source water manifold Chamber pneumatic: 1/8 Poly line set Chamber C: PCII Etch Resonator Pedestal lift MKS Manometer Convectron gauge Ion gauge Turbo pump Wafer lift RF Match No process kit Chamber 1, 2, 3, 4, C: Gas panel assy MFC: STEC 4400 MFC Down steam valve Manual shut off valve MFC Control cable MFC Inter-connect PCB Sub-module: CTI-CRYOGENICS 9600 Cryo compressor (2) Cryo controllers: 3 Phase NESLAB III Chiller Vacuum pump System pump: BOC EDWARDS QDP40 PCII Pump: BOC EDWARDS QDP40 + MB250 System rack: VEM SBC SEI (12) DIO AI (2) AO (3) Opto PCB (2) AI MUX Cryo temp / AI MUX (4) Steppers PCB TC Gauge PCB (2) Ion gauges PCB (4) Invertron gauges PCB OMS PCB Hard Disk Drive (HDD) Floppy Disk Drive (FDD) (4) HTR Lift drivers, 2-Phase (6) Robot drives, 5-Phase RF Rack: RF / DC Rack (5) ISO Amp (4) DC / RF Generator interlocks PCB DC Power supply ADVANCED ENERGY MDX-L12 DC Generator CPS 1001 RF Generator RFPPLF10A RF Generator Missing parts: Metal blades Laser tubes Heater type: Clamp Cryo pump, 3 Phase Turbo controller RF / DC Rack ADVANCED ENERGY MDX-L Series DC Generator RF Generator, 13.56 MHz / 400 kHz Power supply: AC Rack type: 480 VAC, 3 Phase, 4+1 Wire with transformer DC Power supply: +5 VDC / +24 VDC DC Power supply: +/-15 VDC / +/-12 VDC 2000 vintage.