판매용 중고 AMAT / APPLIED MATERIALS Endura 5500 #9241831

System, 6" Load lock chamber: LLC Type: Narrow body Indexer without rotation Wafer mapping CH Vent: Slow / Fast vent No wafer slide out detector Buffer chamber: Robot unit: HP Blade type: Metal Upper & lower motor (2) Gate valves Cryo pump: 3 Phase (7) Wafer sensors Transfer chamber: Robot unit: HP Blade type: Metal Upper & lower motor (2) Gate valves Cryo pump: 3 Phase (6) Wafer sensors Chamber A: Pass through Chamber B: Cool down Chamber A / B: Lid type: Clear plastic Wafer lift Wafer lift hoop No TC monitor Chamber E / F: Oreintor degas Degas lamp module Wafer lift Wafer lift hoop Wafer chuck Orientor controller PCB Laser tub missing Laser CCD array PCB No TC No TC amp Chamber 1: PVD Wide body Source assy: 11.3" Source bracket kit Coh ti adaptor plate Wafer lift: Clamp Heater: Clamp Heater water box: Clamp Manometer: MKS 100 mT Ar Backside (2) Gate valves Ion gauge Shutter option Cryo pump: 3 Phase Heater type: Clamp Chamber harness Chamber inter-connect PCB Chamber process gas line Chamber vent line Chamber source water manifold Chamber pneumatic 1/8 poly line set Chamber 2: PVD Wide body Source assy, 11.3" Source bracket kit Adaptor plate: WB to STD 13" Wafer lift: Clamp Heater: Clamp Heater water box: Clamp Manometer: MKS 100 mT Ar Backside (2) Gate valves Ion gauge Shutter option Cryo pump: 3 Phase Heater type: Clamp Chamber harness Chamber inter-connect PCB Chamber process gas line Chamber vent line Chamber source water manifold Chamber pneumatic: 1/8 Poly line set Chamber 3 / 4: PVD Wide body Source assy: 11.3" Source bracket kit Adaptor plate: WB to STD 13" Wafer lift: Clamp Heater: Clamp Heater water box: Clamp Manometer: MKS 100 mT Convectron gauge Ar Backside (3) Gate valves: PVD Ion gauge Shutter option Cryo pump: 3 Phase Heater type Chamber harness Chamber inter-connect PCB Chamber process gas line Chamber vent line Chamber source water manifold Chamber pneumatic: 1/8 Poly line set Chamber C: PCII Etch Resonator Pedestal lift MKS Manometer Convectron gauge Ion gauge Turbo pump Wafer lift RF Match No process kit Chamber 1,2,3,4 & C: Gas panel assy MFC: (STEC 4400) MFC Down steam valve Manual shut off valve MFC Control cable MFC Inter-connect PCB Sub-module: Cryo compressor: CTI 9600 & 8500 (2) Cryo controllers: 3 Phase Chiller: NESLAB III Vacuum pump System pump: BOC EDWARDS QDP40 PCII Pump: BOC EDWARDS QDP40 + MB250 System rack: VEM SBC Video SEI (12) DIO AI (2) AO (3) Opto PCB (2) AI Mux Cryo temp /AI MUX (4) Steppers PCB TC Gauge PCB (2) Ion gauge PCB (4) Invertron gauge PCB OMS PCB Hard disk FD Disk (4) 2-Phase HTR lift drivers (6) 5-Phase robot drives RF Rack: RF/DC Rack Turbo controller (5) ISO AMP (4) DC/RF Generator interlocks PCB DC Power supply DC Generator: Model ADVANCE ENERGY MDX-L series RF Generator CPS 1001 RF Generator RFPPLF10A AC Rack type: 480 VAC, 3 Phase, 4+1 Wire with transformer DC Power supply: +5 VDC / +24 VDC DC Power supply: +/-15 VDC / +/-12 VDC 2000 vintage.