판매용 중고 AMAT / APPLIED MATERIALS Endura 5500 #9208048

PVD System, 8" Single board computer in controller: V452 Copper barrier / Seed Wafer handling: SNNF Front panel type: Light pen Loadlock vents: Variable speed Buffer / Transfer robot: HP Blade material: Thin metal Chamber A: Bypass Chamber B: Cool Chamber E: Degas Chamber F: Degas Chamber C: Pre clean Vacuum pump type: Turbo/dry RF Match: PVD 200 Cable length: 50 Feet Pedestal type: Cylinder Power supply 1: CPS-1001S Power supply 2: RFPP LF10A Chamber 1 / 2: Body style: WB Source type: VECTRA IMP Power supply: MXD-L12M 12KW Heater: B101 Dual TC amp kit: No Pedestal: B101 Target: D-Bond Magnet: RH-2 Magnet shim thx: 0.75 mm Gasline fittings: VCR Loadlock fittings: VCR Process MFC-1: 1 Ar 100 Process MFC-2: 1 Ar 100 Paste chamber: No System roughing pump type: Dry Chamber cryo pump type: CTI OB-8F, 3 phase Heat exchangers: 1000 Cryo compressors: 9600 X2 Umbilicals: Mainframe to controller: 75 Feet Mainframe to generator racks: 75 Feet Mainframe to cryo compressor: 75 Feet Main AC to system controller/sys AC: 75 Feet System AC to primary generator rack: 50 Feet Main AC to primary generator rack: 6 Feet Main AC to pump frame: 50 Feet Main AC to NESLAB heat exchanger: 50 Feet Monitor cable: 50 Feet 2002 vintage.