판매용 중고 AMAT / APPLIED MATERIALS Endura 5500 #9064236

System, 8" Process CH. 3: AL, CH. D: PC2(Oxide Etch ) Software version Unknown Wafer Shape SNNF Wafer Cassette 8”PEEK Miraial SMIF Interface None Heat exchanger: none Chamber A COOL(STANDARD COOLDOWN CHAMBER) Chamber B COOL(STANDARD COOLDOWN CHAMBER) Chamber D PC2(Cryo Type) Chamber E Orienter(ORIENTER WITH STANDARD DEGAS) Chamber F Orienter(ORIENTER WITH STANDARD DEGAS) Chamber 3 AL(Wide Body) Transfer: Load LockA/B Type Narrow automated tilt out Transfer Robot Type HP+ Transfer Robot Blade Metal Buffer Robot Type HP+ Buffer Robot Blade Metal Buffer Cryo Type BROOKS 8116071G001 Transfer Cryo Type BROOKS 8116071G001 Chamber D: Process Type Oxide Etch Chamber Body Cryo Type(AMJ：0020-23249) Pedestal Parts No. AMJ ：0010-20754 Lift Assy Parts No. AMJ ：0010-20753 Power Supply (kw) AMJ ：0190-70099 Gas Pallet Configuration: N2 MFC size 20sccm(SEC-4400MC) N2 MFC size 300sccm(SEC-4400MC) Chamber 3: Process Type AL Chamber Body Wide Body(AMJ：0040-20195) Source Type Standard Target Type Unknown Magnet Type AMJ ：0010-20225(Mechanical Fail) Magnet Shim Size 0.5MM Lift Assy Parts No. 0010-70271 Heater Parts No. 0010-12516 Power Supply (kw) MDX-L12M-650(AMJ ：0190-21110) Power Supply (kw) MDX-L12M-650(AMJ ：0190-21110) Cryo Gate Valve Type 3Positon Cryo Pump Type Enhanced(8116071G001) Gas Pallet Configuration: N2 MFC size 20sccm(SEC-4400MC) N2 MFC size 100sccm(SEC-4400MC) Cryo compressors: (1) BROOOKS 8510, gas: He (99.999%pure) (1) BROOOKS 8500, P/N: 8031348G001, gas: He (99.999%pure) 2000 vintage.