판매용 중고 AMAT / APPLIED MATERIALS Centura MxP #293750251

Poly etcher, 8" Orienter chamber: Hoop type: STD Chamber wall flow sensor Chamber cathode flow sensor Chamber turbo pump flow sensor No SMIF EMO Switch type EMO Guard ring Chamber type: Position A: Poly Position B: Poly Position F: Orienter Load lock storage elevator: Set stage mechanism: Up and down movement Poly etch chamber: Manometer type: 1 Torr Throttling valve assy Chamber O-rings: Viton ENI OEM-12B RF Generator BOC EDWARDS / SEIKO SEIKI STP-301 Turbo pump BOC EDWARDS / SEIKO SEIKI Turbo pump controller QUARTZ Endpoint window Gas panel: Gas panel doors: Solid Top exhaust No single line drop Top single line drop gas line feed SLD Fitting type: VCR FUJIKIN Veriflow valve MILLIPORE Ni 10 Ra Filter AERA FC-780C Mass Flow Controller (MFC) Gas configuration: Chamber A and B Gas / Size HBr / 100 SCCM Cl2 / 100 SCCM SF6 / 100 SCCM CF4 / 50 SCCM HeO2 / 10 SCCM HeO2 / 100 SCCM Power supply: 200/208 VAC, 60 Hz 1996 vintage.