판매용 중고 AMAT / APPLIED MATERIALS Centura ACP RP #9096042

Epitaxial silicon (EPI) System, 12" Position A: Yes Position B: Yes Position C: Yes Position D: Yes System software: B2.7_39 FiCGUI: fB4.90_15 Beta GP: gB7.50_11 WIP Delivery type: OHT WIP delivery (2) Load ports Remote control system capable: NO eDiagnostics ready: Yes Docked E99 reading capability: Yes Load port types: Enhanced 25-Wafer FOUP Docking flange shield: Yes Air intake system: Top intake E84 carrier handoff: Upper E84 interface enabled OHT E84 PIO sensors and cables: Upper E84 sensor an cable E99 Carrier ID: TIRIS With RF Operator access switch: Yes Carrier ID host interface: No OHT Light curtain: Light curtain SECS Trace: Yes Single axis aligner: Single axis aligner Robots: No Mainframe type: CORE ENP BLOCK 2 LL: Batch load lack Chamber Interface: Vented stainless stell insert Pumps: Process pump: EDWARDS iH1000SC, 100 Hz Transfer Pump: ALCATEL ADS602 LL Pump: ALCATEL ADS602 Baratrons : MKS Lift Pins: Hollow silicon carbide graphite Recipe control AccuSETT: Yes Lamp type: USHIO 0190-31284 Process temperature: PID Control real time display Emissivity: 0.55 to 0.75 upper and 0.6 to 0.8 lower Upper/Lower Gain (kw/C): 0.5 NOT allowed to adjust but capable Upper/Lower TI (sec): 10s Upper 20s Lower Gas panel feed: Bottom Pump purge: YES Regulators and displays Transducers and regulators SiH2CI2 Stick 07: DCS (500 sccm) HCl Stick 03: HCL (500 sccm) SiH4 tick 04: SIH4 (500 sccm) H2 NIL H2 Main Stick 01: Purge main (100000 sccm) H2 Slit Stick 02: Purge slit (30000 sccm) 3 degree flared in upper outer threaded upper inner: threaded upper inner 0041-01969 FTGNIP QDISC: FTGNIP QDISC 3/8BODY X 3/8-18FP1.71"LSST303 3300-01720 Phase II hardware Shaft 6-arm susceptor support: Reflector Base Lower mid Top Lower mid H2 Purifier: Yes Currently de-installed.