판매용 중고 AMAT / APPLIED MATERIALS Centura 5200 #9182239

SACVD System, 8" Process: eMax Mainframe AC Power rack Chiller: Buffer chamber Cool down chamber with NBLL HEWLETT-PACKARD Robot Wafer shape: SNNF SMIF Interface: NO Chamber A / B / C: eMax Chamber F: Orientor Load lock A / B: Narrow (6) Wafer sensors SMIF: No EPD Controller Chamber A / B / C: RF Match: 0010-30686 RF Generator: OEM-28B ALCATEL ATH1600M Turbo pump Throttle valve MKS TYPE627 1TORR Mono meter Mainframe information: System placement: System alone Robot type: HP+ L/L Wafer mapping Slit valve & plate type: Standard Robot blade: AL W/F Slippage sensor N2 Purge Heat exchanger (Chiller): No System monitor: Stand alone System placement: System alone Dry pumps: Chamber A / B / C / D: No Load lock: No Transfer: No Gas panel configuration: Chamber A / B / C: (6) Channels SF6 / 100 Sccm / STEC SEC-7740 N2 / 100 Sccm / STEC SEC-7740 O2 / 100 Sccm / STEC SEC-7740 CF4 / 100 Sccm / STEC SEC-7740 CHF3 / 200 Sccm / STEC SEC-7740 AR / 200 Sccm / STEC SEC-7740 Missing parts: (2) Slit valves Electrical: Line frequency: 50 / 60 Hz Power: 208 VAC, 4 Wires, 3 Phase delta 1997 vintage.