판매용 중고 AMAT / APPLIED MATERIALS Centura 5200 Phase I #9133092

Oxide etcher, 8" Wafer shape: JMF Chamber Type/ Location Selected Option System Configuration BASE Position A Oxide Main Etch Position B Oxide Main Etch Position C Oxide Main Etch Position F ORIENTER Position A Configuration Oxide Main Etch Position B Configuration Oxide Main Etch Position C Configuration Oxide Main Etch Position D Configuration System Safety Equipment Selected Option EMO Switch Type TURN TO RELEASE EMO ETI COMPLIANT EMO Guard Ring INCLUDED Smoke Detector At MF No Skin YES Smoke Detector At Gen Rack YES Smoke Detector At AC Rack YES Water and Smoke Detector ALARM System Labels ENGLISH CHA - CHA - OXIDE Chamber Options Selected Option Process Kit USED Turbo Pump Seikoseiki 301 Emission Endpoint Type Monocro Oxide ESC USED Flat BIAS RF GEN OEM-28B MxP Oxide Throttle Butter fly MxP Oxide Gate Valve VAT CHB - CHB - OXIDE Chamber Options Selected Option Process Kit USED Turbo Pump Seikoseiki 301 Emission Endpoint Type Monocro Oxide ESC USED Flat BIAS RF GEN OEM-28B MxP Oxide Throttle Butter fly MxP Oxide Gate Valve VAT CHC - CHC - OXIDE Chamber Options Selected Option Process Kit USED Turbo Pump Seikoseiki 301 Emission Endpoint Type Monocro Oxide ESC USED Flat BIAS RF GEN OEM-28B MxP Oxide Throttle Butter fly MxP Oxide Gate Valve VAT Gas Delivery Options Pallet Options Selected Option Valve Fujikin Regulator Fujikin Gas Panel Pallet A Gas Panel Pallet A Gas Line Requirement Selected Option Pallet Pallet Gas Line Configuration Selected Option Pallet Corrosive Gas Line Qty 3 Pallet Inert Gas Line Qty 5 Filter Qty 8 Gas Panel Pallet B Gas Panel Pallet B Gas Line Requirement Selected Option Pallet Pallet Gas Line Configuration Selected Option Pallet Corrosive Gas Line Qty 3 Pallet Inert Gas Line Qty 5 Filter Qty 8 Gas Panel Pallet C Gas Panel Pallet C Gas Line Requirement Selected Option Pallet Pallet Gas Line Configuration Selected Option Pallet Corrosive Gas Line Qty 3 Pallet Inert Gas Line Qty 5 Filter Qty 8 Gas Panel Features Gas Panel Features Gas Panel Features Selected Option Gas Panel Controller VME I Mainframe General Mainframe Options Selected Option Facilities Type REGULATED Facilities Orientation MAINFRAME FACILITIES BACK CONNECTION Loadlock/Cassette Options Selected Option Loadlock Type NBLL W/ AUTO-ROTATION Loadlock Cover Finish ANTI-STATIC PAINTED Loadlock Slit Valve Oring Type VITON Wafer Mapping STD Wafer Out of Cassette Sensor YES Cassette Present Sensor YES Transfer Chamber Options Selected Option Transfer Ch Manual Lid Hoist YES Robot Type CENTURA HP ROBOT Wafer On Blade Detector BASIC Loadlock Vent BOTTOM VENT Front Panel Selected Option Front Panel ANTI-STATIC PAINTED Signal Light Tower 4 COLOR SIGNAL LIGHT TOWER INCLUDING RED LIGHT 4 Color Signal Light Tower Configuration Selected Option Top Light Color RED Second Light Color YELLOW Third Light Color GREEN Fourth Light Color BLUE Signal Light Tower Buzzer ENABLED Second Signal Light Tower YES Remote System Controller Selected Option Controller Type 86 INCH COMMON CONTROLLER Cntrlr Electrical Interface BOTTOM FEED Controller Exhaust TOP EXHAUST Controller Cover Option YES System Monitors Selected Option System Monitor 2 TTW / different cable lengths Monitor Cursor 2 BLINKING CURSOR AC Rack Selected Option GFI 30mAMP AC Rack Types 84 INCH SLIM AC GEN RACK Exhaust Collar 84 INCH SLIM RACK EXHAUST COLLAR Umbilical Selected Option Ctrlr to Mainframe Umbilical 25Ft HX Control Cable Length 50Ft Heat Exchanger Hose Length 65Ft Pump Cable Length 65Ft RF Generator Cable 65Ft Pump Interface Only Selected Option Pump Interface Qty Interface Only.