판매용 중고 AMAT / APPLIED MATERIALS Centura 5200 eMax #9183472

Etcher, 8" Wafer shape: JMF SMIF Interface: No System information: Chamber A,B &C: eMax Chamber D & E: No Chamber F: Orientor Loadlock A & B: Narrow (6) Wafer sensors EPD Controller System placement: System alone Chamber details: Chamber A, B & C: RF Match: 0010-30686 RF Generator: OEM-28B ALCATEL ATH1600M Turbo pump Throttle valve Monometer: TYPE127 1TORR System monitor: Monitor 1: Stand alone Mainframe: Robot type: HEWLETT-PACKARD+ L/L Wafer mapping Slit valve / Plate type: Standard Robot blade: Ceramic W/F Slippage sensor N2 Purge Heat exchanger: No Dry pumps: No Signal tower: No Gas panel configuration: Chamber A, B & C: (7) Chambers Chamber A: CL2 100 sccm SEC-4400M CF4 100 sccm TYLAN 2900 N2 100 sccm SEC-4400 AR 300 sccm SEC-4400M O2 5 slm SEC-4400M CHF3 20 sccm SEC-4400M CF4 100 sccm SEC-4400M Chamber B: C4F8 50 sccm SEC-7440MC CO 500 sccm SEC-7440MC N2 100 sccm SEC-4400 AR 200 sccm SEC-4400M O2 50 sccm SEC-4400M CHF3 100 sccm SEC-4400M CF4 50 sccm SEC-4400M Chamber C: CL2 100 sccm SEC-7440MC CHF3 50 sccm TYLAN 2900 N2 100 sccm SEC-4400 AR 2 slm SEC-4400M O2 5 slm SEC-4400M CHF3 20 sccm SEC-4400M CF4 50 sccm SEC-4400M Missing parts: (2) Slit valves (3) Flow sensors / Coolant lines EDP Monitor Liner for chamber B Power: 208 VAC, 50/60 Hz, 4 Wire, 3 Phase delta 1996 vintage.