판매용 중고 AMAT / APPLIED MATERIALS Centura 5200 DPS R1 #9099752

Metal etcher, 8" Wafer type: 8" SNNF (2) DPS R1 metal chambers (2) ASP+ chambers (1) Orienter (1) Cool down Load Locks: wide body with auto-rotation Robot: VHP+ Platform type: Etch Centura Phase II SMIF: not available RF rack, GMW25 Chamber A & B: DPS R1 Metal Single cathode Turbo pump: Seiko Seiki STP-H1303 Upper chamber body: Y2O3 coating Electrostatic chuck type: polymide ESC Upper chamber o-ring: Viton Dome and EDTCU: R1 DTCU Endpoint type: monochromator Bias generator: ACG 6B Bias match: STD Capture ring: STD polymide ESC Source generator: STD 2500W Slit valve o-ring: Viton Throttle Gate Valve: TGV VAT65 Chamber C & D: APS+ Process kit: chuck O-ring: silicon Process control: manometer Slit valve o-ring: Viton Plasma tube o-ring: Kalrez Microwave Smart match Magnetron head Applicator VDS assembly Chamber E: STD cool down Chamber F: orienter Gas Panel: control VME 1 Controller: Centura common rack Generator rack: 84" rack Line frequency: 50Hz Loadlock / Cassette: Loadlock type: WBLL with auto-rotation Loadlock platform: universal Cassette type supported: KA200 85MTRHS 47C02 Loadlock cover finish: anti-static painted Loadlock slit valve o-ring type: Viton Wafer mapping: enhanced Integrated cassette sensor: yes Transfer Chamber: Manual lid hoist: yes Robot type: Centura VHP+ Robot blade option: roughened Al blade Wafer on blade detector: basic Loadlock vent: bottom Signal Light Tower: 3-color, front panel Top light color: red Second light color: yellow Third light color: green Light tower buzzer: disabled Endpoint: Mounting: stand alone Cart: 56" tall, painted Monochromators: (2) Total Endpoints: (2) System Controller: Standard GEM interface: yes Controller type: 84" common controller Electrical interface: bottom feed Exhaust: top System Monitors: Type: CRT Monitor 1: stand alone Cables: 25' AC Rack: GFI: 30mA Type: 84" Controller facility interface: remote UPS interface only Generator Rack: Cooling water: water manifold Manifold facilities: 3/4" compression tube fittings Gas Delivery Options: Vapor Delivery System (VDS): Ultra Clean Component selection: premium Valve: Fujikin Transducer: Millipore Regulator: Veriflo Filter: Millipore Transducer displays: (1) display per stick MFC type: Unit 8160 Gas Panel Pallet: A/B Gas Line Requirement: 4/6 Gas Line Configuration: Line 1 Gas CL2 MFC Size 200 SCCM Line 2 Gas BCL3 MFC Size 100 SCCM Line 5 Gas N2 MFC Size 20 SCCM Line 6 Gas EMPTY MFC Size EMPTY Line 7 Gas CHF3 MFC Size 20 SCCM Line 8 Gas O2 MFC Size 500 SCCM Line 9 Gas SF6 MFC Size 200 SCCM Line 10 Gas AR-S MFC Size 200 SCCM Pallet Corrosive Gas Lines: (2) Pallet Inert Gas Lines: (5) Filters: (7) Gas Panel Pallet C/D: Gas Line Requirement: 0/4 Gas Line Configuration: Line 3 Gas O2 MFC Size 5 SLM Line 4 Gas N2-S MFC Size 1 SLM Line 5 Gas VDS MFC Size 750 sccm Pallet Inert Gas Lines: (3) Filters: (3) Gas panel facilities hook-up: top feed, multi-line drop Gas panel exhaust: BD chamber side top Gas panel controller: VME Safety: EMO switch: turn to release, ETI compliant EMO guard ring: included Smoke detector at controller: yes Smoke detector at MF no skin: yes 50 Hz 1998 vintage.